Vacuum vaporizer for fabrication of thin films of material by sublimations
The offered vacuum vaporizer can be used under the vacuum fabrication of films from Cr, Mg, Mn, SiO, GeO, MoO3 , WO3, ZnS, ZnSe, CdS, CdSe, CdTe by sublimations. Vacuum vaporizer containing tubular element with tightly closed by flat end areas, executed from Та (or Мо) foil by the thickness (0,...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education
2019-12-01
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| Series: | Омский научный вестник |
| Subjects: | |
| Online Access: | https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2019/6%20(168)/80-82%20%D0%91%D0%BB%D0%B5%D1%81%D0%BC%D0%B0%D0%BD%20%D0%90.%20%D0%98.,%20%D0%91%D1%83%D1%80%D0%BB%D0%B0%D0%BA%D0%BE%D0%B2%20%D0%A0.%20%D0%91..pdf |
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| Summary: | The offered vacuum vaporizer can be used under the vacuum
fabrication of films from Cr, Mg, Mn, SiO, GeO, MoO3
, WO3,
ZnS, ZnSe, CdS, CdSe, CdTe by sublimations. Vacuum vaporizer
containing tubular element with tightly closed by flat end areas,
executed from Та (or Мо) foil by the thickness (0,05–0,1) mm
with the high temperature of melting and evaporations and is
kept a central region of the radial cross-section with the hole in
the manner of the oval situated between flat end areas having
variable area of the current section, which decreases toward from
the centre of the tubular element to its ends. The offered vaporizer has broader field-performance and technological possibilities,
since for the fabrication of the vaporizer use a metallic foil that
allows under its fabrication to change amounts of the vaporizer.
Herewith the vaporizer possible to use for fabrication of films
repeatedly executing its recurrent boot without removing from
the vacuum camera. |
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| ISSN: | 1813-8225 2541-7541 |