Effects of Doping Cr and Cr-Ni on the Properties of TiAlN Thin Films under Different Bias Voltage
In order to optimize the surface properties of 4Cr13 stainless steel and obtain the best bias process of film preparation, the TiAlN films doped with Cr or Cr-Ni were deposited on the surface of 4Cr13 stainless steel by multi-arc ion plating and magnetron sputtering under different bias voltage proc...
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| Main Author: | |
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| Format: | Article |
| Language: | zho |
| Published: |
Editorial Department of Materials Protection
2021-02-01
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| Series: | Cailiao Baohu |
| Subjects: | |
| Online Access: | http://www.mat-pro.com/fileup/1001-1560/PDF/20210212.pdf |
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