Basic research on CVD single crystal diamond processing by UV nanosecond laser

Basic research on CVD single crystal diamond processing by UV nanosecond laser

ObjectivesChemical vapor deposition (CVD) diamond has excellent material properties and a wide range of application prospects, but due to its high hardness, brittleness and chemical inertness, microstructure processing on the surface and inside is extremely difficult. Based on the advantages of high...

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Bibliographic Details
Main Authors:	Huabin ZHAN, Kaixuan FENG, Yupeng CHEN, Jing LI, Jiawei WEI, Jianhui CHEN, Qi HAO, Changwei WAN, Ni CHEN
Format:	Article
Language:	zho
Published:	Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd. 2025-04-01
Series:	Jin'gangshi yu moliao moju gongcheng
Subjects:	uv nanosecond laser single crystal diamond laser etching flat top laser
Online Access:	http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2024.0097
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