CRYSTAL PROPERTIES OF SILICON OBTAINED BY THERMOMIGRATION
The article presents research results of the crystal structure of the silicon regions, locally recrystallized in the process of thermomigration liquid silicon-aluminum areas of a silicon substrate. Selective etching of silicon is found that recrystallized in the channel, there are areas that have in...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
North Caucasus Federal University
2022-05-01
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| Series: | Вестник Северо-Кавказского федерального университета |
| Subjects: | |
| Online Access: | https://vestnikskfu.elpub.ru/jour/article/view/1034 |
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