Fabrication and characterization of strain-induced graphene for chemisorption-based graphene resonant mass sensors
We propose a strain application process and structure for a chemisorption-based resonant mass sensor using graphene, aiming to develop a novel sensing platform with high sensitivity and selectivity. The results demonstrate the successful application of 0.26%–0.30% strain to suspended graphene throug...
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| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
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IOP Publishing
2024-01-01
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| Series: | Applied Physics Express |
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| Online Access: | https://doi.org/10.35848/1882-0786/ad94cc |
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| author | Viet Khoa Pham Motoki Kato Jumpei Uesaka Rintaro Tsubouchi Kousuke Go Yong-Joon Choi Toshihiko Noda Kazuaki Sawada Kazuhiro Takahashi |
| author_facet | Viet Khoa Pham Motoki Kato Jumpei Uesaka Rintaro Tsubouchi Kousuke Go Yong-Joon Choi Toshihiko Noda Kazuaki Sawada Kazuhiro Takahashi |
| author_sort | Viet Khoa Pham |
| collection | DOAJ |
| description | We propose a strain application process and structure for a chemisorption-based resonant mass sensor using graphene, aiming to develop a novel sensing platform with high sensitivity and selectivity. The results demonstrate the successful application of 0.26%–0.30% strain to suspended graphene through the thermal shrinkage of SU-8, resulting in a 25% improvement in resonance characteristics. Furthermore, we demonstrated the mass sensing of severe acute respiratory syndrome coronavirus 2 (SARS-CoV-2) spikes chemisorbed on the strain-applied graphene resonant mass sensor, achieving a mass sensitivity 149,000 times higher than that of silicon-based chemisorption mass sensors. |
| format | Article |
| id | doaj-art-4713abec393d4854b4cd105035eaf04f |
| institution | OA Journals |
| issn | 1882-0786 |
| language | English |
| publishDate | 2024-01-01 |
| publisher | IOP Publishing |
| record_format | Article |
| series | Applied Physics Express |
| spelling | doaj-art-4713abec393d4854b4cd105035eaf04f2025-08-20T01:59:21ZengIOP PublishingApplied Physics Express1882-07862024-01-01171212700110.35848/1882-0786/ad94ccFabrication and characterization of strain-induced graphene for chemisorption-based graphene resonant mass sensorsViet Khoa Pham0Motoki Kato1Jumpei Uesaka2Rintaro Tsubouchi3Kousuke Go4Yong-Joon Choi5https://orcid.org/0000-0003-1063-3752Toshihiko Noda6https://orcid.org/0000-0001-6964-9148Kazuaki Sawada7Kazuhiro Takahashi8Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology , Toyohashi, Aichi 441-8580, JapanDepartment of Electrical and Electronic Information Engineering, Toyohashi University of Technology , Toyohashi, Aichi 441-8580, JapanDepartment of Electrical and Electronic Information Engineering, Toyohashi University of Technology , Toyohashi, Aichi 441-8580, JapanDepartment of Electrical and Electronic Information Engineering, Toyohashi University of Technology , Toyohashi, Aichi 441-8580, JapanDepartment of Electrical and Electronic Information Engineering, Toyohashi University of Technology , Toyohashi, Aichi 441-8580, JapanDepartment of Electrical and Electronic Information Engineering, Toyohashi University of Technology , Toyohashi, Aichi 441-8580, JapanDepartment of Electrical and Electronic Information Engineering, Toyohashi University of Technology , Toyohashi, Aichi 441-8580, Japan; Institute for Research on Next-generation Semiconductor and Sensing Science (IRES2), Toyohashi University of Technology , Toyohashi, Aichi 441-8580, JapanDepartment of Electrical and Electronic Information Engineering, Toyohashi University of Technology , Toyohashi, Aichi 441-8580, Japan; Institute for Research on Next-generation Semiconductor and Sensing Science (IRES2), Toyohashi University of Technology , Toyohashi, Aichi 441-8580, JapanDepartment of Electrical and Electronic Information Engineering, Toyohashi University of Technology , Toyohashi, Aichi 441-8580, Japan; Institute for Research on Next-generation Semiconductor and Sensing Science (IRES2), Toyohashi University of Technology , Toyohashi, Aichi 441-8580, JapanWe propose a strain application process and structure for a chemisorption-based resonant mass sensor using graphene, aiming to develop a novel sensing platform with high sensitivity and selectivity. The results demonstrate the successful application of 0.26%–0.30% strain to suspended graphene through the thermal shrinkage of SU-8, resulting in a 25% improvement in resonance characteristics. Furthermore, we demonstrated the mass sensing of severe acute respiratory syndrome coronavirus 2 (SARS-CoV-2) spikes chemisorbed on the strain-applied graphene resonant mass sensor, achieving a mass sensitivity 149,000 times higher than that of silicon-based chemisorption mass sensors.https://doi.org/10.35848/1882-0786/ad94ccMEMS resonatorgraphenetensile strainmass sensorresonance frequencySARS-CoV-2 |
| spellingShingle | Viet Khoa Pham Motoki Kato Jumpei Uesaka Rintaro Tsubouchi Kousuke Go Yong-Joon Choi Toshihiko Noda Kazuaki Sawada Kazuhiro Takahashi Fabrication and characterization of strain-induced graphene for chemisorption-based graphene resonant mass sensors Applied Physics Express MEMS resonator graphene tensile strain mass sensor resonance frequency SARS-CoV-2 |
| title | Fabrication and characterization of strain-induced graphene for chemisorption-based graphene resonant mass sensors |
| title_full | Fabrication and characterization of strain-induced graphene for chemisorption-based graphene resonant mass sensors |
| title_fullStr | Fabrication and characterization of strain-induced graphene for chemisorption-based graphene resonant mass sensors |
| title_full_unstemmed | Fabrication and characterization of strain-induced graphene for chemisorption-based graphene resonant mass sensors |
| title_short | Fabrication and characterization of strain-induced graphene for chemisorption-based graphene resonant mass sensors |
| title_sort | fabrication and characterization of strain induced graphene for chemisorption based graphene resonant mass sensors |
| topic | MEMS resonator graphene tensile strain mass sensor resonance frequency SARS-CoV-2 |
| url | https://doi.org/10.35848/1882-0786/ad94cc |
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