Investigating nonlinear dynamic properties of an inertial sensor with rotational velocity-dependent rigidity

Abstract This study investigates the nonlinear dynamics of a system with frequency-dependent stiffness using a MEMS-based capacitive inertial sensor as a case study. The sensor is positioned directly on a rotating component of a machine and consists of a microbeam clamped at both ends by fixed suppo...

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Bibliographic Details
Main Authors: Mina Ghanbari, Mohammad Fathalilou, Hamed Haddad Khodaparast, Ghader Rezazadeh
Format: Article
Language:English
Published: Nature Portfolio 2025-01-01
Series:Scientific Reports
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Online Access:https://doi.org/10.1038/s41598-024-84264-9
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