Research on Pneumatic Proportional Pressure Valve Based on Silicon Microfluidic Chip with V-Shaped Electrothermal Microactuator

Research on Pneumatic Proportional Pressure Valve Based on Silicon Microfluidic Chip with V-Shaped Electrothermal Microactuator

This study presents a pneumatic proportional pressure valve employing a silicon microfluidic chip (SMC) integrated with a V-shaped electrothermal microactuator, aiming to address the limitations of traditional solenoid-based valves in miniaturization and high-precision control. The SMC, fabricated v...

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Bibliographic Details
Main Authors: Jun Zhang, Chengjie Zhou, Yangfang Wu
Format: Article
Language:English
Published: MDPI AG 2025-05-01
Series:Micromachines
Subjects:
silicon microfluidic chip
pneumatic proportional pressure valve
V-shaped electrothermal microactuator
COMSOL Multiphysics
AMESim
Online Access:https://www.mdpi.com/2072-666X/16/5/566
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