Research on Pneumatic Proportional Pressure Valve Based on Silicon Microfluidic Chip with V-Shaped Electrothermal Microactuator
This study presents a pneumatic proportional pressure valve employing a silicon microfluidic chip (SMC) integrated with a V-shaped electrothermal microactuator, aiming to address the limitations of traditional solenoid-based valves in miniaturization and high-precision control. The SMC, fabricated v...
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MDPI AG
2025-05-01
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| Online Access: | https://www.mdpi.com/2072-666X/16/5/566 |
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| author | Jun Zhang Chengjie Zhou Yangfang Wu |
| author_facet | Jun Zhang Chengjie Zhou Yangfang Wu |
| author_sort | Jun Zhang |
| collection | DOAJ |
| description | This study presents a pneumatic proportional pressure valve employing a silicon microfluidic chip (SMC) integrated with a V-shaped electrothermal microactuator, aiming to address the limitations of traditional solenoid-based valves in miniaturization and high-precision control. The SMC, fabricated via MEMS technology, leverages the thermal expansion of microactuator ribs to regulate pressure through adjustable orifices. A first-order transfer function between input voltage and displacement of the microactuator was derived through theoretical modeling and validated via COMSOL Multiphysics 5.2a simulations. Key geometric parameters of the actuator ribs—cross-section, number, inclination angle, width, span length and thickness—were analyzed for their influence on lever mechanism displacement, actuator displacement, static gain and time constant. AMESim 16.0-based simulations of single- and dual-chip valve structures revealed that increasing ζ shortens step-response rise time, while reducing τ improves hysteresis. Experimental validation confirmed the valve’s static and dynamic performance, achieving a step-response rise time of <40 ms, linearity within the 30–60% input voltage range, and effective tracking of sinusoidal control signals up to 8 Hz with a maximum pressure deviation of 0.015 MPa. The work underscores the potential of MEMS-based actuators in advancing compact pneumatic systems, offering a viable alternative to conventional solenoids. Key innovations include geometry-driven actuator optimization and dual-chip integration, providing insights into high-precision, low-cost pneumatic control solutions. |
| format | Article |
| id | doaj-art-45d168cb0896498384a2e86cd116cfb1 |
| institution | OA Journals |
| issn | 2072-666X |
| language | English |
| publishDate | 2025-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj-art-45d168cb0896498384a2e86cd116cfb12025-08-20T02:33:47ZengMDPI AGMicromachines2072-666X2025-05-0116556610.3390/mi16050566Research on Pneumatic Proportional Pressure Valve Based on Silicon Microfluidic Chip with V-Shaped Electrothermal MicroactuatorJun Zhang0Chengjie Zhou1Yangfang Wu2School of Engineering, Hangzhou City University, Hangzhou 310015, ChinaSchool of Intelligent Manufacturing, Taizhou University, Taizhou 318000, ChinaSchool of Engineering, Hangzhou City University, Hangzhou 310015, ChinaThis study presents a pneumatic proportional pressure valve employing a silicon microfluidic chip (SMC) integrated with a V-shaped electrothermal microactuator, aiming to address the limitations of traditional solenoid-based valves in miniaturization and high-precision control. The SMC, fabricated via MEMS technology, leverages the thermal expansion of microactuator ribs to regulate pressure through adjustable orifices. A first-order transfer function between input voltage and displacement of the microactuator was derived through theoretical modeling and validated via COMSOL Multiphysics 5.2a simulations. Key geometric parameters of the actuator ribs—cross-section, number, inclination angle, width, span length and thickness—were analyzed for their influence on lever mechanism displacement, actuator displacement, static gain and time constant. AMESim 16.0-based simulations of single- and dual-chip valve structures revealed that increasing ζ shortens step-response rise time, while reducing τ improves hysteresis. Experimental validation confirmed the valve’s static and dynamic performance, achieving a step-response rise time of <40 ms, linearity within the 30–60% input voltage range, and effective tracking of sinusoidal control signals up to 8 Hz with a maximum pressure deviation of 0.015 MPa. The work underscores the potential of MEMS-based actuators in advancing compact pneumatic systems, offering a viable alternative to conventional solenoids. Key innovations include geometry-driven actuator optimization and dual-chip integration, providing insights into high-precision, low-cost pneumatic control solutions.https://www.mdpi.com/2072-666X/16/5/566silicon microfluidic chippneumatic proportional pressure valveV-shaped electrothermal microactuatorCOMSOL MultiphysicsAMESim |
| spellingShingle | Jun Zhang Chengjie Zhou Yangfang Wu Research on Pneumatic Proportional Pressure Valve Based on Silicon Microfluidic Chip with V-Shaped Electrothermal Microactuator Micromachines silicon microfluidic chip pneumatic proportional pressure valve V-shaped electrothermal microactuator COMSOL Multiphysics AMESim |
| title | Research on Pneumatic Proportional Pressure Valve Based on Silicon Microfluidic Chip with V-Shaped Electrothermal Microactuator |
| title_full | Research on Pneumatic Proportional Pressure Valve Based on Silicon Microfluidic Chip with V-Shaped Electrothermal Microactuator |
| title_fullStr | Research on Pneumatic Proportional Pressure Valve Based on Silicon Microfluidic Chip with V-Shaped Electrothermal Microactuator |
| title_full_unstemmed | Research on Pneumatic Proportional Pressure Valve Based on Silicon Microfluidic Chip with V-Shaped Electrothermal Microactuator |
| title_short | Research on Pneumatic Proportional Pressure Valve Based on Silicon Microfluidic Chip with V-Shaped Electrothermal Microactuator |
| title_sort | research on pneumatic proportional pressure valve based on silicon microfluidic chip with v shaped electrothermal microactuator |
| topic | silicon microfluidic chip pneumatic proportional pressure valve V-shaped electrothermal microactuator COMSOL Multiphysics AMESim |
| url | https://www.mdpi.com/2072-666X/16/5/566 |
| work_keys_str_mv | AT junzhang researchonpneumaticproportionalpressurevalvebasedonsiliconmicrofluidicchipwithvshapedelectrothermalmicroactuator AT chengjiezhou researchonpneumaticproportionalpressurevalvebasedonsiliconmicrofluidicchipwithvshapedelectrothermalmicroactuator AT yangfangwu researchonpneumaticproportionalpressurevalvebasedonsiliconmicrofluidicchipwithvshapedelectrothermalmicroactuator |