The Precision Proton Beam Formation in the Probe System with Individual Power Supplies of Magnetic Quadrupole Lenses (Experimental Results)
Justified the search of new probe systems to forming MeV energy proton beams in high resolution lithographic techniques. To produce description of the nuclear scanning microprobe and experimental conditions to determine parameters of the generated beam: the current and the size of the probe. The pro...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2013-03-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2013/1/articles/jnep_2013_V5_01030.pdf |
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