Effects of Gas–Surface Interaction Conditions on the Performance of Knudsen Force-Based, Low-Pressure Micro Hydrogen Sensors
Knudsen force phenomenon caused by non-uniform temperature fields in rarefied gas has been a topic of interest among researchers of gas sensing and structure actuating for micro-electromechanical systems (MEMS). The effects of gas–surface interaction conditions (accommodation coefficients, temperatu...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-05-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/16/5/593 |
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