APA (7th ed.) Citation

Shi, S., Qian, S., Hou, X., Mu, J., He, J., & Chou, X. Structural and Optical Properties of Amorphous Al2O3 Thin Film Deposited by Atomic Layer Deposition. Wiley.

Chicago Style (17th ed.) Citation

Shi, Shuzheng, Shuo Qian, Xiaojuan Hou, Jiliang Mu, Jian He, and Xiujian Chou. Structural and Optical Properties of Amorphous Al2O3 Thin Film Deposited by Atomic Layer Deposition. Wiley.

MLA (9th ed.) Citation

Shi, Shuzheng, et al. Structural and Optical Properties of Amorphous Al2O3 Thin Film Deposited by Atomic Layer Deposition. Wiley.