Silicon Micromachining for High Performance Passive Structures at W Band
This paper presents a micromachined technology allowing the realization of very high aspect ratio millimeter-wave circuits. Appropriate 3D electromagnetic simulations based on the finite element method have been implemented to design the circuits. Coplanar transmission lines featuring loss level in...
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| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2002-01-01
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| Series: | Active and Passive Electronic Components |
| Online Access: | http://dx.doi.org/10.1080/08827510211278 |
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| _version_ | 1850216006016827392 |
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| author | B. Guillon K. Grenier T. Parra P. Pons D. Cros P. Blondy J. Graffeuil J. L. Cazaux R. Plana |
| author_facet | B. Guillon K. Grenier T. Parra P. Pons D. Cros P. Blondy J. Graffeuil J. L. Cazaux R. Plana |
| author_sort | B. Guillon |
| collection | DOAJ |
| description | This paper presents a micromachined technology allowing the realization of very high aspect ratio millimeter-wave circuits. Appropriate 3D electromagnetic simulations based on the finite element method have been implemented to design the circuits. Coplanar transmission lines featuring loss level in the 2 dB range up to 105 GHz have been realized. An original silicon micromachined cavity using the whispering gallery modes properties has been
realized achieving a quality factor close to 10,000 range at 95 GHz. |
| format | Article |
| id | doaj-art-418ef5b9e24f423a9d55c707bb76dc4b |
| institution | OA Journals |
| issn | 0882-7516 1563-5031 |
| language | English |
| publishDate | 2002-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Active and Passive Electronic Components |
| spelling | doaj-art-418ef5b9e24f423a9d55c707bb76dc4b2025-08-20T02:08:26ZengWileyActive and Passive Electronic Components0882-75161563-50312002-01-0125111312210.1080/08827510211278Silicon Micromachining for High Performance Passive Structures at W BandB. Guillon0K. Grenier1T. Parra2P. Pons3D. Cros4P. Blondy5J. Graffeuil6J. L. Cazaux7R. Plana8LAAS-CNRS, 7 Av du Colonel Roche, Toulouse Cedex04 31077, FranceLAAS-CNRS, 7 Av du Colonel Roche, Toulouse Cedex04 31077, FranceLAAS-CNRS, 7 Av du Colonel Roche, Toulouse Cedex04 31077, FranceLAAS-CNRS, 7 Av du Colonel Roche, Toulouse Cedex04 31077, FranceIRCOM, 123 Av Albert Thomas, Limoges Cedex 87000, FranceIRCOM, 123 Av Albert Thomas, Limoges Cedex 87000, FranceLAAS-CNRS, 7 Av du Colonel Roche, Toulouse Cedex04 31077, FranceAlcatel Space Industry, 26 Av J.F. Champollion, Toulouse 31037, FranceLAAS-CNRS, 7 Av du Colonel Roche, Toulouse Cedex04 31077, FranceThis paper presents a micromachined technology allowing the realization of very high aspect ratio millimeter-wave circuits. Appropriate 3D electromagnetic simulations based on the finite element method have been implemented to design the circuits. Coplanar transmission lines featuring loss level in the 2 dB range up to 105 GHz have been realized. An original silicon micromachined cavity using the whispering gallery modes properties has been realized achieving a quality factor close to 10,000 range at 95 GHz.http://dx.doi.org/10.1080/08827510211278 |
| spellingShingle | B. Guillon K. Grenier T. Parra P. Pons D. Cros P. Blondy J. Graffeuil J. L. Cazaux R. Plana Silicon Micromachining for High Performance Passive Structures at W Band Active and Passive Electronic Components |
| title | Silicon Micromachining for High Performance Passive Structures at W Band |
| title_full | Silicon Micromachining for High Performance Passive Structures at W Band |
| title_fullStr | Silicon Micromachining for High Performance Passive Structures at W Band |
| title_full_unstemmed | Silicon Micromachining for High Performance Passive Structures at W Band |
| title_short | Silicon Micromachining for High Performance Passive Structures at W Band |
| title_sort | silicon micromachining for high performance passive structures at w band |
| url | http://dx.doi.org/10.1080/08827510211278 |
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