Defect Density and Electrical Properties of Vacuum Evaporated Copper Films From Annealing Studies of Electrical Resistance

Defect Density and Electrical Properties of Vacuum Evaporated Copper Films From Annealing Studies of Electrical Resistance

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Bibliographic Details
Main Authors:	C. Balasubramanian, M. Radhakrishnan, K. Narayandas
Format:	Article
Language:	English
Published:	Wiley 1982-01-01
Series:	Active and Passive Electronic Components
Online Access:	http://dx.doi.org/10.1155/APEC.9.171
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