High-Precision Measurement Method for Small Angles Based on the Defect Spot Mode of the Position-Sensitive Detector
The paper proposes and verifies a small-angle measurement method based on the defect spot mode of the position-sensitive detector (PSD). With the output characteristics of the PSD in the defect spot mode and the size transformation properties of a focused beam, the measurement sensitivity can be sig...
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| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-11-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/24/22/7120 |
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| Summary: | The paper proposes and verifies a small-angle measurement method based on the defect spot mode of the position-sensitive detector (PSD). With the output characteristics of the PSD in the defect spot mode and the size transformation properties of a focused beam, the measurement sensitivity can be significantly improved. Calibration experiments with the piezoelectric transducer (PZT) indicate that compared with the current PSD-based autocollimation method, the proposed method can improve the sensitivity of small-angle measurement by 57 times, and the measurement sensitivity of the proposed method can be further improved by optimizing the system parameters, while the proposed method has the advantages of a simple system and high real-time performance. Therefore, the proposed method is expected to be used in high-precision motion error detection, as well as in shape and position measurement. |
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| ISSN: | 1424-8220 |