APA (7th ed.) Citation

Kampfe, T., Tonchev, S., Gomard, G., Seassal, C., & Parriaux, O. Hydrogenated Amorphous Silicon Microstructuring for 0th-Order Polarization Elements at 1.0&#x2013;1.1 <formula formulatype="inline"><tex Notation="TeX">$\mu\hbox{m}$</tex></formula> Wavelength. IEEE.

Chicago Style (17th ed.) Citation

Kampfe, Thomas, Svetlen Tonchev, Guillaume Gomard, Christian Seassal, and Olivier Parriaux. Hydrogenated Amorphous Silicon Microstructuring for 0th-Order Polarization Elements at 1.0&#x2013;1.1 <formula Formulatype="inline"><tex Notation="TeX">$\mu\hbox{m}$</tex></formula> Wavelength. IEEE.

MLA (9th ed.) Citation

Kampfe, Thomas, et al. Hydrogenated Amorphous Silicon Microstructuring for 0th-Order Polarization Elements at 1.0&#x2013;1.1 <formula Formulatype="inline"><tex Notation="TeX">$\mu\hbox{m}$</tex></formula> Wavelength. IEEE.