APA (7th ed.) Citation

Chizhik, S. A., Basalaev, S. P., Pilipenko, V. A., Khudoley, A. L., Kuznetsova, T. A., Chikunov, V. V., & Suslov, A. A. EQUIPMENT FOR NONDESTRUCTIVE TESTING OF SILICON WAFERS SUBMICRON TOPOLOGY DURING THE FABRICATION OF INTEGRATED CIRCUITS. Belarusian National Technical University.

Chicago Style (17th ed.) Citation

Chizhik, S. A., S. P. Basalaev, V. A. Pilipenko, A. L. Khudoley, T. A. Kuznetsova, V. V. Chikunov, and A. A. Suslov. EQUIPMENT FOR NONDESTRUCTIVE TESTING OF SILICON WAFERS SUBMICRON TOPOLOGY DURING THE FABRICATION OF INTEGRATED CIRCUITS. Belarusian National Technical University.

MLA (9th ed.) Citation

Chizhik, S. A., et al. EQUIPMENT FOR NONDESTRUCTIVE TESTING OF SILICON WAFERS SUBMICRON TOPOLOGY DURING THE FABRICATION OF INTEGRATED CIRCUITS. Belarusian National Technical University.