Photolithography Fabricated Broadband Waveguide Grating Couplers With 1 dB Bandwidth Over 100 nm
In this paper, we propose and validate a new approach for increasing the optical bandwidth of waveguide grating couplers by using a center-symmetric grating structure. Our results demonstrate state-of-the-art performance in increasing the 1 dB optical bandwidth to 108 nm and experimentally validated...
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IEEE
2024-01-01
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| Series: | IEEE Photonics Journal |
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| Online Access: | https://ieeexplore.ieee.org/document/10365162/ |
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| author | Xuetong Zhou Hon Ki Tsang |
| author_facet | Xuetong Zhou Hon Ki Tsang |
| author_sort | Xuetong Zhou |
| collection | DOAJ |
| description | In this paper, we propose and validate a new approach for increasing the optical bandwidth of waveguide grating couplers by using a center-symmetric grating structure. Our results demonstrate state-of-the-art performance in increasing the 1 dB optical bandwidth to 108 nm and experimentally validated coupling efficiency of −3.0 dB. The fabrication uses standard MPW fabrication service offered by commercial foundry with a minimum feature size above 181 nm. Such a flat wideband and high-efficiency performance is suitable for large-volume manufacturing and will enable the use of grating couplers in wideband applications such as wavelength division multiplexed communications, broadband applications of optical frequency combs and optical sensors. |
| format | Article |
| id | doaj-art-40529996d48945ed9f13e6ffc8d450d0 |
| institution | DOAJ |
| issn | 1943-0655 |
| language | English |
| publishDate | 2024-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Photonics Journal |
| spelling | doaj-art-40529996d48945ed9f13e6ffc8d450d02025-08-20T03:15:51ZengIEEEIEEE Photonics Journal1943-06552024-01-011611610.1109/JPHOT.2023.334436110365162Photolithography Fabricated Broadband Waveguide Grating Couplers With 1 dB Bandwidth Over 100 nmXuetong Zhou0https://orcid.org/0000-0003-1685-0301Hon Ki Tsang1https://orcid.org/0000-0003-2777-1537Department of Electronic Engineering, The Chinese University of Hong Kong, Shatin, Hong KongDepartment of Electronic Engineering, The Chinese University of Hong Kong, Shatin, Hong KongIn this paper, we propose and validate a new approach for increasing the optical bandwidth of waveguide grating couplers by using a center-symmetric grating structure. Our results demonstrate state-of-the-art performance in increasing the 1 dB optical bandwidth to 108 nm and experimentally validated coupling efficiency of −3.0 dB. The fabrication uses standard MPW fabrication service offered by commercial foundry with a minimum feature size above 181 nm. Such a flat wideband and high-efficiency performance is suitable for large-volume manufacturing and will enable the use of grating couplers in wideband applications such as wavelength division multiplexed communications, broadband applications of optical frequency combs and optical sensors.https://ieeexplore.ieee.org/document/10365162/Integrated opticsdiffraction gratingsgrating couplersilicon photonicssilicon on insulator technology |
| spellingShingle | Xuetong Zhou Hon Ki Tsang Photolithography Fabricated Broadband Waveguide Grating Couplers With 1 dB Bandwidth Over 100 nm IEEE Photonics Journal Integrated optics diffraction gratings grating coupler silicon photonics silicon on insulator technology |
| title | Photolithography Fabricated Broadband Waveguide Grating Couplers With 1 dB Bandwidth Over 100 nm |
| title_full | Photolithography Fabricated Broadband Waveguide Grating Couplers With 1 dB Bandwidth Over 100 nm |
| title_fullStr | Photolithography Fabricated Broadband Waveguide Grating Couplers With 1 dB Bandwidth Over 100 nm |
| title_full_unstemmed | Photolithography Fabricated Broadband Waveguide Grating Couplers With 1 dB Bandwidth Over 100 nm |
| title_short | Photolithography Fabricated Broadband Waveguide Grating Couplers With 1 dB Bandwidth Over 100 nm |
| title_sort | photolithography fabricated broadband waveguide grating couplers with 1 db bandwidth over 100 nm |
| topic | Integrated optics diffraction gratings grating coupler silicon photonics silicon on insulator technology |
| url | https://ieeexplore.ieee.org/document/10365162/ |
| work_keys_str_mv | AT xuetongzhou photolithographyfabricatedbroadbandwaveguidegratingcouplerswith1dbbandwidthover100nm AT honkitsang photolithographyfabricatedbroadbandwaveguidegratingcouplerswith1dbbandwidthover100nm |