Monte Carlo simulations of backscattered electron coefficients and average penetration depths for Cu, Au, and Al under electron irradiation
Abstract Understanding and analyzing backscattered electron coefficients (BSCs) and average penetration depths (APDs) are critical in material science and electron microscopy. However, despite their importance, there are relatively few studies that cover a wide range of energies and a variety of mat...
Saved in:
| Main Author: | |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
SpringerOpen
2025-02-01
|
| Series: | Bulletin of the National Research Centre |
| Subjects: | |
| Online Access: | https://doi.org/10.1186/s42269-025-01304-8 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1823863262076207104 |
|---|---|
| author | Sami Mohammed Alsharari |
| author_facet | Sami Mohammed Alsharari |
| author_sort | Sami Mohammed Alsharari |
| collection | DOAJ |
| description | Abstract Understanding and analyzing backscattered electron coefficients (BSCs) and average penetration depths (APDs) are critical in material science and electron microscopy. However, despite their importance, there are relatively few studies that cover a wide range of energies and a variety of materials for accurately calculating BSCs and APDs. Therefore, a Monte Carlo (MC) simulation was conducted to examine and explore the electron backscattering coefficients and average penetration depths of copper (Cu), gold (Au), and aluminum (Al) when bombarded by energetic electrons with energies ranging from 0 to 60 kilo-electron volts (keV) at normal incidence. The results showed strong agreement with experimental data. First, for the BSCs, we have deviations ranging from 0.3 to 5.4%. Second, the empirical calibration adjustment resulted in an excellent agreement with the experimental data of APDs. For Cu, the deviation was 3.32% at 5 keV. The exceptional agreement was observed at 9 keV for Au, with a deviation of just 0.08%. In the case of Al, the adjustment achieved a strong agreement with a deviation of 2.01%. These findings improve our understanding of backscattered electrons behavior by providing accurate simulations for Cu, Au, and Al across a wide energy range, resolving discrepancies, especially for low-Z materials such as aluminum (Z = 13). The improved accuracy in predicting APD and the original BSC results support scanning electron microscopy (SEM) applications, particularly in compositional and topographic imaging. |
| format | Article |
| id | doaj-art-400fc3ab5aab465087bf558a42e8f454 |
| institution | Kabale University |
| issn | 2522-8307 |
| language | English |
| publishDate | 2025-02-01 |
| publisher | SpringerOpen |
| record_format | Article |
| series | Bulletin of the National Research Centre |
| spelling | doaj-art-400fc3ab5aab465087bf558a42e8f4542025-02-09T12:11:02ZengSpringerOpenBulletin of the National Research Centre2522-83072025-02-0149111110.1186/s42269-025-01304-8Monte Carlo simulations of backscattered electron coefficients and average penetration depths for Cu, Au, and Al under electron irradiationSami Mohammed AlsharariAbstract Understanding and analyzing backscattered electron coefficients (BSCs) and average penetration depths (APDs) are critical in material science and electron microscopy. However, despite their importance, there are relatively few studies that cover a wide range of energies and a variety of materials for accurately calculating BSCs and APDs. Therefore, a Monte Carlo (MC) simulation was conducted to examine and explore the electron backscattering coefficients and average penetration depths of copper (Cu), gold (Au), and aluminum (Al) when bombarded by energetic electrons with energies ranging from 0 to 60 kilo-electron volts (keV) at normal incidence. The results showed strong agreement with experimental data. First, for the BSCs, we have deviations ranging from 0.3 to 5.4%. Second, the empirical calibration adjustment resulted in an excellent agreement with the experimental data of APDs. For Cu, the deviation was 3.32% at 5 keV. The exceptional agreement was observed at 9 keV for Au, with a deviation of just 0.08%. In the case of Al, the adjustment achieved a strong agreement with a deviation of 2.01%. These findings improve our understanding of backscattered electrons behavior by providing accurate simulations for Cu, Au, and Al across a wide energy range, resolving discrepancies, especially for low-Z materials such as aluminum (Z = 13). The improved accuracy in predicting APD and the original BSC results support scanning electron microscopy (SEM) applications, particularly in compositional and topographic imaging.https://doi.org/10.1186/s42269-025-01304-8Monte Carlo simulationsElectron backscattering coefficientAverage penetration depthMaterialsElectron-matter interactionsElectron range |
| spellingShingle | Sami Mohammed Alsharari Monte Carlo simulations of backscattered electron coefficients and average penetration depths for Cu, Au, and Al under electron irradiation Bulletin of the National Research Centre Monte Carlo simulations Electron backscattering coefficient Average penetration depth Materials Electron-matter interactions Electron range |
| title | Monte Carlo simulations of backscattered electron coefficients and average penetration depths for Cu, Au, and Al under electron irradiation |
| title_full | Monte Carlo simulations of backscattered electron coefficients and average penetration depths for Cu, Au, and Al under electron irradiation |
| title_fullStr | Monte Carlo simulations of backscattered electron coefficients and average penetration depths for Cu, Au, and Al under electron irradiation |
| title_full_unstemmed | Monte Carlo simulations of backscattered electron coefficients and average penetration depths for Cu, Au, and Al under electron irradiation |
| title_short | Monte Carlo simulations of backscattered electron coefficients and average penetration depths for Cu, Au, and Al under electron irradiation |
| title_sort | monte carlo simulations of backscattered electron coefficients and average penetration depths for cu au and al under electron irradiation |
| topic | Monte Carlo simulations Electron backscattering coefficient Average penetration depth Materials Electron-matter interactions Electron range |
| url | https://doi.org/10.1186/s42269-025-01304-8 |
| work_keys_str_mv | AT samimohammedalsharari montecarlosimulationsofbackscatteredelectroncoefficientsandaveragepenetrationdepthsforcuauandalunderelectronirradiation |