Study on the piezoresistivity of Cr-doped V2O3 thin film for MEMS sensor applications

Study on the piezoresistivity of Cr-doped V2O3 thin film for MEMS sensor applications

Abstract Cr-doped V2O3 thin film shows a huge resistivity change with controlled epitaxial strain at room temperature as a result of a gradual Mott metal-insulator phase transition with strain. This novel piezoresistive transduction principle makes Cr-doped V2O3 thin film an appealing piezoresistive...

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Bibliographic Details
Main Authors: Michiel Gidts, Wei-Fan Hsu, Maria Recaman Payo, Shaswat Kushwaha, Frederik Ceyssens, Dominiek Reynaerts, Jean-Pierre Locquet, Michael Kraft, Chen Wang
Format: Article
Language:English
Published: Nature Publishing Group 2024-12-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-024-00807-0
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