Structure of TiAlN Reactive Sputtered Coatings
The Raman spectra, X-ray diffraction and hardness of the TiAlN films co-deposited on the steel substrates by reactive sputtering from Ti and Al targets in a mixture of N2 + Ar gas with two magnetrons at room temperature have been studied. From Raman spectra it is found that the position of high-freq...
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Sumy State University
2012-03-01
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| Series: | Журнал нано- та електронної фізики |
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| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2012/1/articles/jnep_2012_V4_01021.pdf |
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| author | D. Philippon V. Godinho V.D. Blank A.S. Useinov K.V. Gogolinsky A.N. Kirichenko S.N. Polyakov B.N. Mavrin E.A. Vinogradov V.N. Denisov A. Fernandez |
| author_facet | D. Philippon V. Godinho V.D. Blank A.S. Useinov K.V. Gogolinsky A.N. Kirichenko S.N. Polyakov B.N. Mavrin E.A. Vinogradov V.N. Denisov A. Fernandez |
| author_sort | D. Philippon |
| collection | DOAJ |
| description | The Raman spectra, X-ray diffraction and hardness of the TiAlN films co-deposited on the steel substrates by reactive sputtering from Ti and Al targets in a mixture of N2 + Ar gas with two magnetrons at room temperature have been studied. From Raman spectra it is found that the position of high-frequency bands in vibrational spectra was located at 700-730 cm1 or in the region of 830 850 cm1 depending on the deposition parameters whereas it is not exceed 630 cm1 from TiAlN of NaCl structure. It is found the two-phase structure of coatings: a small quantity of NaCl-type structure of TiAlN (TiN) and the disordered structure of the chains of polyhedra [TiNx] with x = 5 and x = 4. The chains of polyhedra [TiNx] with x = 4 are mainly formed at large discharge power of Al(Ti) target or at small content of N2 gas. <br> The Raman spectra, X-ray diffraction and hardness of the TiAlN films co-deposited on the steel substrates by reactive sputtering from Ti and Al targets in a mixture of N2 + Ar gas with two magnetrons at room temperature have been studied. From Raman spectra it is found that the position of high-frequency bands in vibrational spectra was located at 700-730 cm1 or in the region of 830 850 cm1 depending on the deposition parameters whereas it is not exceed 630 cm1 from TiAlN of NaCl structure. It is found the two-phase structure of coatings: a small quantity of NaCl-type structure of TiAlN (TiN) and the disordered structure of the chains of polyhedra [TiNx] with x = 5 and x = 4. The chains of polyhedra [TiNx] with x = 4 are mainly formed at large discharge power of Al(Ti) target or at small content of N2 gas. <br> The Raman spectra, X-ray diffraction and hardness of the TiAlN films co-deposited on the steel substrates by reactive sputtering from Ti and Al targets in a mixture of N2 + Ar gas with two magnetrons at room temperature have been studied. From Raman spectra it is found that the position of high-frequency bands in vibrational spectra was located at 700-730 cm1 or in the region of 830 850 cm1 depending on the deposition parameters whereas it is not exceed 630 cm1 from TiAlN of NaCl structure. It is found the two-phase structure of coatings: a small quantity of NaCl-type structure of TiAlN (TiN) and the disordered structure of the chains of polyhedra [TiNx] with x = 5 and x = 4. The chains of polyhedra [TiNx] with x = 4 are mainly formed at large discharge power of Al(Ti) target or at small content of N2 gas. |
| format | Article |
| id | doaj-art-3e812448603a4e49b58fb4b778438732 |
| institution | OA Journals |
| issn | 2077-6772 |
| language | English |
| publishDate | 2012-03-01 |
| publisher | Sumy State University |
| record_format | Article |
| series | Журнал нано- та електронної фізики |
| spelling | doaj-art-3e812448603a4e49b58fb4b7784387322025-08-20T02:08:20ZengSumy State UniversityЖурнал нано- та електронної фізики2077-67722012-03-0141010211Structure of TiAlN Reactive Sputtered CoatingsD. PhilipponV. GodinhoV.D. BlankA.S. UseinovK.V. GogolinskyA.N. KirichenkoS.N. PolyakovB.N. MavrinE.A. VinogradovV.N. DenisovA. FernandezThe Raman spectra, X-ray diffraction and hardness of the TiAlN films co-deposited on the steel substrates by reactive sputtering from Ti and Al targets in a mixture of N2 + Ar gas with two magnetrons at room temperature have been studied. From Raman spectra it is found that the position of high-frequency bands in vibrational spectra was located at 700-730 cm1 or in the region of 830 850 cm1 depending on the deposition parameters whereas it is not exceed 630 cm1 from TiAlN of NaCl structure. It is found the two-phase structure of coatings: a small quantity of NaCl-type structure of TiAlN (TiN) and the disordered structure of the chains of polyhedra [TiNx] with x = 5 and x = 4. The chains of polyhedra [TiNx] with x = 4 are mainly formed at large discharge power of Al(Ti) target or at small content of N2 gas. <br> The Raman spectra, X-ray diffraction and hardness of the TiAlN films co-deposited on the steel substrates by reactive sputtering from Ti and Al targets in a mixture of N2 + Ar gas with two magnetrons at room temperature have been studied. From Raman spectra it is found that the position of high-frequency bands in vibrational spectra was located at 700-730 cm1 or in the region of 830 850 cm1 depending on the deposition parameters whereas it is not exceed 630 cm1 from TiAlN of NaCl structure. It is found the two-phase structure of coatings: a small quantity of NaCl-type structure of TiAlN (TiN) and the disordered structure of the chains of polyhedra [TiNx] with x = 5 and x = 4. The chains of polyhedra [TiNx] with x = 4 are mainly formed at large discharge power of Al(Ti) target or at small content of N2 gas. <br> The Raman spectra, X-ray diffraction and hardness of the TiAlN films co-deposited on the steel substrates by reactive sputtering from Ti and Al targets in a mixture of N2 + Ar gas with two magnetrons at room temperature have been studied. From Raman spectra it is found that the position of high-frequency bands in vibrational spectra was located at 700-730 cm1 or in the region of 830 850 cm1 depending on the deposition parameters whereas it is not exceed 630 cm1 from TiAlN of NaCl structure. It is found the two-phase structure of coatings: a small quantity of NaCl-type structure of TiAlN (TiN) and the disordered structure of the chains of polyhedra [TiNx] with x = 5 and x = 4. The chains of polyhedra [TiNx] with x = 4 are mainly formed at large discharge power of Al(Ti) target or at small content of N2 gas.http://jnep.sumdu.edu.ua/download/numbers/2012/1/articles/jnep_2012_V4_01021.pdfCoatingHardnessReactive SputteringTiAlNX-Ray DiffractionRaman SpectroscopCoatingHardnessReactive SputteringTiAlNX-Ray DiffractionRaman SpectroscopCoatingHardnessReactive SputteringTiAlNX-Ray DiffractionRaman Spectroscop |
| spellingShingle | D. Philippon V. Godinho V.D. Blank A.S. Useinov K.V. Gogolinsky A.N. Kirichenko S.N. Polyakov B.N. Mavrin E.A. Vinogradov V.N. Denisov A. Fernandez Structure of TiAlN Reactive Sputtered Coatings Журнал нано- та електронної фізики Coating Hardness Reactive Sputtering TiAlN X-Ray Diffraction Raman Spectroscop Coating Hardness Reactive Sputtering TiAlN X-Ray Diffraction Raman Spectroscop Coating Hardness Reactive Sputtering TiAlN X-Ray Diffraction Raman Spectroscop |
| title | Structure of TiAlN Reactive Sputtered Coatings |
| title_full | Structure of TiAlN Reactive Sputtered Coatings |
| title_fullStr | Structure of TiAlN Reactive Sputtered Coatings |
| title_full_unstemmed | Structure of TiAlN Reactive Sputtered Coatings |
| title_short | Structure of TiAlN Reactive Sputtered Coatings |
| title_sort | structure of tialn reactive sputtered coatings |
| topic | Coating Hardness Reactive Sputtering TiAlN X-Ray Diffraction Raman Spectroscop Coating Hardness Reactive Sputtering TiAlN X-Ray Diffraction Raman Spectroscop Coating Hardness Reactive Sputtering TiAlN X-Ray Diffraction Raman Spectroscop |
| url | http://jnep.sumdu.edu.ua/download/numbers/2012/1/articles/jnep_2012_V4_01021.pdf |
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