Flexible calorimetric differential pressure sensor array integrated with a superhydrophobic surface for flight parameter estimation
Abstract Distributed pressure sensor array is a promising approach for the estimation of flight parameters for small unmanned aerial vehicles. Current flexible pressure sensor arrays are conventionally subjected to limited sensor resolution, poor bending flexibility, and inadequate packaging protect...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2025-07-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-025-00942-2 |
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| _version_ | 1849333554329157632 |
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| author | Xin Ke Yu Gao Zheng Gong Yunfan Li Zihao Dong Bowei Wan Yurun Guo Yonggang Jiang |
| author_facet | Xin Ke Yu Gao Zheng Gong Yunfan Li Zihao Dong Bowei Wan Yurun Guo Yonggang Jiang |
| author_sort | Xin Ke |
| collection | DOAJ |
| description | Abstract Distributed pressure sensor array is a promising approach for the estimation of flight parameters for small unmanned aerial vehicles. Current flexible pressure sensor arrays are conventionally subjected to limited sensor resolution, poor bending flexibility, and inadequate packaging protection, resulting in insufficient precision for flight parameter estimation. Here we present a high-resolution differential pressure sensor array using a calorimetric measurement method and a multilayer polyimide bonding technique. The proposed differential pressure sensor array reaches a detection limit of 36.5 mPa over a range of 500 Pa and shows high repeatability when attached to varying curved surfaces. In addition, a superhydrophobic packaging is integrated into the sensor fabrication process, endowing it with waterproof capability. Utilizing a multilayer perceptron neural network, we demonstrated the function of the sensor array in estimating airspeeds and angle of attacks, achieving average solving errors of 0.15 m/s and 0.37°, respectively. |
| format | Article |
| id | doaj-art-3ced4aeb4910440aad79d8d6ca1f1071 |
| institution | Kabale University |
| issn | 2055-7434 |
| language | English |
| publishDate | 2025-07-01 |
| publisher | Nature Publishing Group |
| record_format | Article |
| series | Microsystems & Nanoengineering |
| spelling | doaj-art-3ced4aeb4910440aad79d8d6ca1f10712025-08-20T03:45:49ZengNature Publishing GroupMicrosystems & Nanoengineering2055-74342025-07-011111910.1038/s41378-025-00942-2Flexible calorimetric differential pressure sensor array integrated with a superhydrophobic surface for flight parameter estimationXin Ke0Yu Gao1Zheng Gong2Yunfan Li3Zihao Dong4Bowei Wan5Yurun Guo6Yonggang Jiang7Institute of Bionic and Micro-nano Systems, School of Mechanical Engineering and Automation, Beihang UniversityInstitute of Bionic and Micro-nano Systems, School of Mechanical Engineering and Automation, Beihang UniversityInstitute of Bionic and Micro-nano Systems, School of Mechanical Engineering and Automation, Beihang UniversityInstitute of Bionic and Micro-nano Systems, School of Mechanical Engineering and Automation, Beihang UniversityInstitute of Bionic and Micro-nano Systems, School of Mechanical Engineering and Automation, Beihang UniversityInstitute of Bionic and Micro-nano Systems, School of Mechanical Engineering and Automation, Beihang UniversityInstitute of Bionic and Micro-nano Systems, School of Mechanical Engineering and Automation, Beihang UniversityInstitute of Bionic and Micro-nano Systems, School of Mechanical Engineering and Automation, Beihang UniversityAbstract Distributed pressure sensor array is a promising approach for the estimation of flight parameters for small unmanned aerial vehicles. Current flexible pressure sensor arrays are conventionally subjected to limited sensor resolution, poor bending flexibility, and inadequate packaging protection, resulting in insufficient precision for flight parameter estimation. Here we present a high-resolution differential pressure sensor array using a calorimetric measurement method and a multilayer polyimide bonding technique. The proposed differential pressure sensor array reaches a detection limit of 36.5 mPa over a range of 500 Pa and shows high repeatability when attached to varying curved surfaces. In addition, a superhydrophobic packaging is integrated into the sensor fabrication process, endowing it with waterproof capability. Utilizing a multilayer perceptron neural network, we demonstrated the function of the sensor array in estimating airspeeds and angle of attacks, achieving average solving errors of 0.15 m/s and 0.37°, respectively.https://doi.org/10.1038/s41378-025-00942-2 |
| spellingShingle | Xin Ke Yu Gao Zheng Gong Yunfan Li Zihao Dong Bowei Wan Yurun Guo Yonggang Jiang Flexible calorimetric differential pressure sensor array integrated with a superhydrophobic surface for flight parameter estimation Microsystems & Nanoengineering |
| title | Flexible calorimetric differential pressure sensor array integrated with a superhydrophobic surface for flight parameter estimation |
| title_full | Flexible calorimetric differential pressure sensor array integrated with a superhydrophobic surface for flight parameter estimation |
| title_fullStr | Flexible calorimetric differential pressure sensor array integrated with a superhydrophobic surface for flight parameter estimation |
| title_full_unstemmed | Flexible calorimetric differential pressure sensor array integrated with a superhydrophobic surface for flight parameter estimation |
| title_short | Flexible calorimetric differential pressure sensor array integrated with a superhydrophobic surface for flight parameter estimation |
| title_sort | flexible calorimetric differential pressure sensor array integrated with a superhydrophobic surface for flight parameter estimation |
| url | https://doi.org/10.1038/s41378-025-00942-2 |
| work_keys_str_mv | AT xinke flexiblecalorimetricdifferentialpressuresensorarrayintegratedwithasuperhydrophobicsurfaceforflightparameterestimation AT yugao flexiblecalorimetricdifferentialpressuresensorarrayintegratedwithasuperhydrophobicsurfaceforflightparameterestimation AT zhenggong flexiblecalorimetricdifferentialpressuresensorarrayintegratedwithasuperhydrophobicsurfaceforflightparameterestimation AT yunfanli flexiblecalorimetricdifferentialpressuresensorarrayintegratedwithasuperhydrophobicsurfaceforflightparameterestimation AT zihaodong flexiblecalorimetricdifferentialpressuresensorarrayintegratedwithasuperhydrophobicsurfaceforflightparameterestimation AT boweiwan flexiblecalorimetricdifferentialpressuresensorarrayintegratedwithasuperhydrophobicsurfaceforflightparameterestimation AT yurunguo flexiblecalorimetricdifferentialpressuresensorarrayintegratedwithasuperhydrophobicsurfaceforflightparameterestimation AT yonggangjiang flexiblecalorimetricdifferentialpressuresensorarrayintegratedwithasuperhydrophobicsurfaceforflightparameterestimation |