All-Silicon Terahertz Metasurface With Sharp Fano Resonance and Its Sensing Applications
The all silicon terahertz metasurface with sharp Fano resonance and its sensing applications with high Q factor have been investigated. Such metasurface, composed of periodic grooves, can be fabricated by deep silicon etching on high-resistivity silicon. When the refractive index of the sample chang...
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| Format: | Article |
| Language: | English |
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IEEE
2021-01-01
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| Series: | IEEE Photonics Journal |
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| Online Access: | https://ieeexplore.ieee.org/document/9376588/ |
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| author | Yajun Zhong Lianghui Du Qiao Liu Liguo Zhu Yi Zou Bin Zhang |
| author_facet | Yajun Zhong Lianghui Du Qiao Liu Liguo Zhu Yi Zou Bin Zhang |
| author_sort | Yajun Zhong |
| collection | DOAJ |
| description | The all silicon terahertz metasurface with sharp Fano resonance and its sensing applications with high Q factor have been investigated. Such metasurface, composed of periodic grooves, can be fabricated by deep silicon etching on high-resistivity silicon. When the refractive index of the sample changes, the shifted resonance frequency appears and the resonance intensity can be modulated by altering the surface conductivity. The Q characteristics of the metasurface and the applications of graphene sensing are then analyzed and verified. The results indicates that the Q factor of the metasurface can reach 39857, the standard sensitivity is 16042 nm/RIU, and the FOM is 533. Meanwhile, the characteristics of sensing graphene samples (∼1 nm) are very useful for sensing other ultra-thin materials or biomolecules. |
| format | Article |
| id | doaj-art-3c739511301545f396762dfc1fcd4bab |
| institution | OA Journals |
| issn | 1943-0655 |
| language | English |
| publishDate | 2021-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Photonics Journal |
| spelling | doaj-art-3c739511301545f396762dfc1fcd4bab2025-08-20T02:38:10ZengIEEEIEEE Photonics Journal1943-06552021-01-0113211010.1109/JPHOT.2021.30650969376588All-Silicon Terahertz Metasurface With Sharp Fano Resonance and Its Sensing ApplicationsYajun Zhong0Lianghui Du1Qiao Liu2Liguo Zhu3Yi Zou4Bin Zhang5Institute of Fluid Physics, China Academy of Engineering Physics, Mianyang, Sichuan, ChinaInstitute of Fluid Physics, China Academy of Engineering Physics, Mianyang, Sichuan, ChinaInstitute of Fluid Physics, China Academy of Engineering Physics, Mianyang, Sichuan, ChinaInstitute of Fluid Physics, China Academy of Engineering Physics, Mianyang, Sichuan, ChinaInstitute of Fluid Physics, China Academy of Engineering Physics, Mianyang, Sichuan, ChinaCollege of Electronics and Information Engineering, Sichuan University, Chengdu, Sichuan, ChinaThe all silicon terahertz metasurface with sharp Fano resonance and its sensing applications with high Q factor have been investigated. Such metasurface, composed of periodic grooves, can be fabricated by deep silicon etching on high-resistivity silicon. When the refractive index of the sample changes, the shifted resonance frequency appears and the resonance intensity can be modulated by altering the surface conductivity. The Q characteristics of the metasurface and the applications of graphene sensing are then analyzed and verified. The results indicates that the Q factor of the metasurface can reach 39857, the standard sensitivity is 16042 nm/RIU, and the FOM is 533. Meanwhile, the characteristics of sensing graphene samples (∼1 nm) are very useful for sensing other ultra-thin materials or biomolecules.https://ieeexplore.ieee.org/document/9376588/All-silicon metasurfacesharp resonancerefractive index sensinggraphene sensing |
| spellingShingle | Yajun Zhong Lianghui Du Qiao Liu Liguo Zhu Yi Zou Bin Zhang All-Silicon Terahertz Metasurface With Sharp Fano Resonance and Its Sensing Applications IEEE Photonics Journal All-silicon metasurface sharp resonance refractive index sensing graphene sensing |
| title | All-Silicon Terahertz Metasurface With Sharp Fano Resonance and Its Sensing Applications |
| title_full | All-Silicon Terahertz Metasurface With Sharp Fano Resonance and Its Sensing Applications |
| title_fullStr | All-Silicon Terahertz Metasurface With Sharp Fano Resonance and Its Sensing Applications |
| title_full_unstemmed | All-Silicon Terahertz Metasurface With Sharp Fano Resonance and Its Sensing Applications |
| title_short | All-Silicon Terahertz Metasurface With Sharp Fano Resonance and Its Sensing Applications |
| title_sort | all silicon terahertz metasurface with sharp fano resonance and its sensing applications |
| topic | All-silicon metasurface sharp resonance refractive index sensing graphene sensing |
| url | https://ieeexplore.ieee.org/document/9376588/ |
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