APA (7th ed.) Citation

JangJian, S., & Wang, Y. Substrate Effect on Plasma Clean Efficiency in Plasma Enhanced Chemical Vapor Deposition System. Wiley.

Chicago Style (17th ed.) Citation

JangJian, Shiu-Ko, and Ying-Lang Wang. Substrate Effect on Plasma Clean Efficiency in Plasma Enhanced Chemical Vapor Deposition System. Wiley.

MLA (9th ed.) Citation

JangJian, Shiu-Ko, and Ying-Lang Wang. Substrate Effect on Plasma Clean Efficiency in Plasma Enhanced Chemical Vapor Deposition System. Wiley.

Warning: These citations may not always be 100% accurate.