Spectroscopic Ellipsometry of Plasmonic GratingsIdeal Parameters for Sensing and Subpicometer Measurement Uncertainty

Spectroscopic Ellipsometry of Plasmonic GratingsIdeal Parameters for Sensing and Subpicometer Measurement Uncertainty

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Bibliographic Details
Main Authors:	Deshabrato Mukherjee, Sven Burger, Thomas Siefke, Jeetendra Gour, Bernd Bodermann, Peter Petrik
Format:	Article
Language:	English
Published:	American Chemical Society 2025-04-01
Series:	ACS Omega
Online Access:	https://doi.org/10.1021/acsomega.5c00951
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