Spectroscopic Ellipsometry of Plasmonic GratingsIdeal Parameters for Sensing and Subpicometer Measurement Uncertainty
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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American Chemical Society
2025-04-01
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| Series: | ACS Omega |
| Online Access: | https://doi.org/10.1021/acsomega.5c00951 |
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| _version_ | 1850187177467576320 |
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| author | Deshabrato Mukherjee Sven Burger Thomas Siefke Jeetendra Gour Bernd Bodermann Peter Petrik |
| author_facet | Deshabrato Mukherjee Sven Burger Thomas Siefke Jeetendra Gour Bernd Bodermann Peter Petrik |
| author_sort | Deshabrato Mukherjee |
| collection | DOAJ |
| format | Article |
| id | doaj-art-3b723df9de714944b40661b6d938bc8a |
| institution | OA Journals |
| issn | 2470-1343 |
| language | English |
| publishDate | 2025-04-01 |
| publisher | American Chemical Society |
| record_format | Article |
| series | ACS Omega |
| spelling | doaj-art-3b723df9de714944b40661b6d938bc8a2025-08-20T02:16:10ZengAmerican Chemical SocietyACS Omega2470-13432025-04-011014144661447310.1021/acsomega.5c00951Spectroscopic Ellipsometry of Plasmonic GratingsIdeal Parameters for Sensing and Subpicometer Measurement UncertaintyDeshabrato Mukherjee0Sven Burger1Thomas Siefke2Jeetendra Gour3Bernd Bodermann4Peter Petrik5Institute for Technical Physics and Materials Science, HUN-REN Centre for Energy Research, Budapest, HungaryZuse Institute Berlin, Berlin, GermanyInstitute of Applied Physics, Friedrich Schiller University, Jena, GermanyInstitute of Applied Physics, Friedrich Schiller University, Jena, GermanyPhysikalisch-Technische Bundesanstalt, Braunschweig, GermanyInstitute for Technical Physics and Materials Science, HUN-REN Centre for Energy Research, Budapest, Hungaryhttps://doi.org/10.1021/acsomega.5c00951 |
| spellingShingle | Deshabrato Mukherjee Sven Burger Thomas Siefke Jeetendra Gour Bernd Bodermann Peter Petrik Spectroscopic Ellipsometry of Plasmonic GratingsIdeal Parameters for Sensing and Subpicometer Measurement Uncertainty ACS Omega |
| title | Spectroscopic Ellipsometry of Plasmonic GratingsIdeal Parameters for Sensing and Subpicometer Measurement Uncertainty |
| title_full | Spectroscopic Ellipsometry of Plasmonic GratingsIdeal Parameters for Sensing and Subpicometer Measurement Uncertainty |
| title_fullStr | Spectroscopic Ellipsometry of Plasmonic GratingsIdeal Parameters for Sensing and Subpicometer Measurement Uncertainty |
| title_full_unstemmed | Spectroscopic Ellipsometry of Plasmonic GratingsIdeal Parameters for Sensing and Subpicometer Measurement Uncertainty |
| title_short | Spectroscopic Ellipsometry of Plasmonic GratingsIdeal Parameters for Sensing and Subpicometer Measurement Uncertainty |
| title_sort | spectroscopic ellipsometry of plasmonic gratingsideal parameters for sensing and subpicometer measurement uncertainty |
| url | https://doi.org/10.1021/acsomega.5c00951 |
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