High performance laser induced plasma assisted ablation by GHz burst mode femtosecond pulses
High performance laser micromachining based on the combination of GHz burst mode femtosecond pulses irradiation and laser induced plasma assisted ablation can open a new avenue for high-quality and high-efficiency micromachining of single crystalline sapphire.
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Institue of Optics and Electronics, Chinese Academy of Sciences
2024-12-01
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| Series: | Opto-Electronic Advances |
| Online Access: | https://www.oejournal.org/article/doi/10.29026/oea.2024.240222 |
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