Enhancing parameters of silicon varactors using laser gettering

The authors investigate how and why defects influence the inverse characteristics of varactors. The paper presents experimental results on the effect laser gettering has on the electrical parameters of varactors. The mechanisms of the laser gettering effect on the parameters of varactors are analyze...

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Bibliographic Details
Main Authors: I. M. Vikulin, V. N. Litvinenko, S. V. Shutov, A. I. Maronchuk, A. N. Demenskiy, V. I. Glukhova
Format: Article
Language:English
Published: Politehperiodika 2018-04-01
Series:Tekhnologiya i Konstruirovanie v Elektronnoi Apparature
Subjects:
Online Access:https://tkea.com.ua/index.php/journal/article/view/163
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