Achieving Ultra‐Low Contact Resistance via Copper‐Intercalated Bilayer MoS2

Abstract The high contact resistance between MoS2 and metals hinders its potential as an ideal solution for overcoming the short‐channel effect in silicon‐based FETs at sub‐3 nm scales. A MoS2‐based transistor, featuring bilayer MoS2 connected to Cu‐intercalated bilayer MoS2 electrodes is theoretica...

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Main Authors: Huan Wang, Xiaojie Liu, Hui Wang, Yin Wang, Haitao Yin
Format: Article
Language:English
Published: Wiley-VCH 2025-08-01
Series:Advanced Electronic Materials
Subjects:
Online Access:https://doi.org/10.1002/aelm.202500100
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author Huan Wang
Xiaojie Liu
Hui Wang
Yin Wang
Haitao Yin
author_facet Huan Wang
Xiaojie Liu
Hui Wang
Yin Wang
Haitao Yin
author_sort Huan Wang
collection DOAJ
description Abstract The high contact resistance between MoS2 and metals hinders its potential as an ideal solution for overcoming the short‐channel effect in silicon‐based FETs at sub‐3 nm scales. A MoS2‐based transistor, featuring bilayer MoS2 connected to Cu‐intercalated bilayer MoS2 electrodes is theoretically designed. At 0.6 V, contact resistance is 16.7 Ω µm (zigzag) and 30.0 Ω µm (armchair), nearing or even surpassing the 30 Ω µm quantum limit for single‐layer materials. This low resistance is attributed to the elimination of the tunneling barrier and the creation of ohmic contacts. Additionally, the small contact potential difference enables lower operating voltages. The intercalation design offers a novel approach to achieving low contact resistance in two‐dimentional electronic devices.
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institution Kabale University
issn 2199-160X
language English
publishDate 2025-08-01
publisher Wiley-VCH
record_format Article
series Advanced Electronic Materials
spelling doaj-art-3891397dfc0b4eeda70f3b2a97569e4e2025-08-25T10:40:02ZengWiley-VCHAdvanced Electronic Materials2199-160X2025-08-011113n/an/a10.1002/aelm.202500100Achieving Ultra‐Low Contact Resistance via Copper‐Intercalated Bilayer MoS2Huan Wang0Xiaojie Liu1Hui Wang2Yin Wang3Haitao Yin4Key Laboratory for Photonic and Electronic Bandgap Materials of Ministry of Education School of Physics and Electronic Engineering Harbin Normal University Harbin 150025 ChinaKey Laboratory for Photonic and Electronic Bandgap Materials of Ministry of Education School of Physics and Electronic Engineering Harbin Normal University Harbin 150025 ChinaKey Laboratory for Photonic and Electronic Bandgap Materials of Ministry of Education School of Physics and Electronic Engineering Harbin Normal University Harbin 150025 ChinaDepartment of Physics and International Centre for Quantum and Molecular Structures Shanghai University Shanghai 200444 ChinaKey Laboratory for Photonic and Electronic Bandgap Materials of Ministry of Education School of Physics and Electronic Engineering Harbin Normal University Harbin 150025 ChinaAbstract The high contact resistance between MoS2 and metals hinders its potential as an ideal solution for overcoming the short‐channel effect in silicon‐based FETs at sub‐3 nm scales. A MoS2‐based transistor, featuring bilayer MoS2 connected to Cu‐intercalated bilayer MoS2 electrodes is theoretically designed. At 0.6 V, contact resistance is 16.7 Ω µm (zigzag) and 30.0 Ω µm (armchair), nearing or even surpassing the 30 Ω µm quantum limit for single‐layer materials. This low resistance is attributed to the elimination of the tunneling barrier and the creation of ohmic contacts. Additionally, the small contact potential difference enables lower operating voltages. The intercalation design offers a novel approach to achieving low contact resistance in two‐dimentional electronic devices.https://doi.org/10.1002/aelm.202500100contact resistanceintercalationMoS2ohmic contact
spellingShingle Huan Wang
Xiaojie Liu
Hui Wang
Yin Wang
Haitao Yin
Achieving Ultra‐Low Contact Resistance via Copper‐Intercalated Bilayer MoS2
Advanced Electronic Materials
contact resistance
intercalation
MoS2
ohmic contact
title Achieving Ultra‐Low Contact Resistance via Copper‐Intercalated Bilayer MoS2
title_full Achieving Ultra‐Low Contact Resistance via Copper‐Intercalated Bilayer MoS2
title_fullStr Achieving Ultra‐Low Contact Resistance via Copper‐Intercalated Bilayer MoS2
title_full_unstemmed Achieving Ultra‐Low Contact Resistance via Copper‐Intercalated Bilayer MoS2
title_short Achieving Ultra‐Low Contact Resistance via Copper‐Intercalated Bilayer MoS2
title_sort achieving ultra low contact resistance via copper intercalated bilayer mos2
topic contact resistance
intercalation
MoS2
ohmic contact
url https://doi.org/10.1002/aelm.202500100
work_keys_str_mv AT huanwang achievingultralowcontactresistanceviacopperintercalatedbilayermos2
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AT huiwang achievingultralowcontactresistanceviacopperintercalatedbilayermos2
AT yinwang achievingultralowcontactresistanceviacopperintercalatedbilayermos2
AT haitaoyin achievingultralowcontactresistanceviacopperintercalatedbilayermos2