Cluster beam sources. Part 1. Methods of cluster beams generation
The short review on cluster beams generation is proposed. The basic types of cluster sources are considered and the processes leading to cluster formation are analyzed. The parameters, that affects the work of cluster sources are presented.
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2012-10-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2012/3/articles/jnep_2012_V4_03015.pdf |
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