Nano-seeding catalysts for high-density arrays of horizontally aligned carbon nanotubes with wafer-scale uniformity
Abstract In the realm of modern materials science, horizontally aligned carbon nanotube arrays stand as promising materials for the development of next-generation integrated circuits. However, their large-scale integration has been impeded by the constraints of current fabrication techniques, which...
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Nature Portfolio
2025-01-01
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| Series: | Nature Communications |
| Online Access: | https://doi.org/10.1038/s41467-024-55515-0 |
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| author | Ying Xie Yue Li Zhisheng Peng Chengyu Wang Zanlin Qiu Xinyi Cai Tinglu Song Jia Si Xiaoxu Zhao Liu Qian Ziqiang Zhao Jin Zhang |
| author_facet | Ying Xie Yue Li Zhisheng Peng Chengyu Wang Zanlin Qiu Xinyi Cai Tinglu Song Jia Si Xiaoxu Zhao Liu Qian Ziqiang Zhao Jin Zhang |
| author_sort | Ying Xie |
| collection | DOAJ |
| description | Abstract In the realm of modern materials science, horizontally aligned carbon nanotube arrays stand as promising materials for the development of next-generation integrated circuits. However, their large-scale integration has been impeded by the constraints of current fabrication techniques, which struggle to achieve the necessary uniformity, density, and size control of carbon nanotube arrays. Overcoming this challenge necessitates a significant shift in fabrication approaches. Herein, we present a nano-seeding method that revolutionized the preparation of catalyst nanoparticles, crucial for carbon-nanotube-array synthesis. Our approach, underpinned by ion implantation and substrate processing, allows for precise control over catalyst formation. Further development of a vertical spraying chemical vapor deposition system homogenizes the gas flow and ensures the uniform growth of carbon nanotube arrays. This nano-seeding method culminates in the direct growth of one-inch carbon-nanotube-array wafers with the highest density of 140 tubes μm−1. The high density and uniformity of the as-prepared carbon-nanotube-array wafers are validated through an advanced high-throughput characterization technique. The electrical properties of high on-state current, high on/off ratio and low subthreshold swing are demonstrated in field-effect transistors based on the arrays. This study propels the scalability of carbon-nanotube-array fabrication for future carbon-based electronics. |
| format | Article |
| id | doaj-art-372b1000ea3b48abab30a073bd2a87c6 |
| institution | Kabale University |
| issn | 2041-1723 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | Nature Portfolio |
| record_format | Article |
| series | Nature Communications |
| spelling | doaj-art-372b1000ea3b48abab30a073bd2a87c62025-01-05T12:39:36ZengNature PortfolioNature Communications2041-17232025-01-011611910.1038/s41467-024-55515-0Nano-seeding catalysts for high-density arrays of horizontally aligned carbon nanotubes with wafer-scale uniformityYing Xie0Yue Li1Zhisheng Peng2Chengyu Wang3Zanlin Qiu4Xinyi Cai5Tinglu Song6Jia Si7Xiaoxu Zhao8Liu Qian9Ziqiang Zhao10Jin Zhang11School of Materials Science and Engineering, Peking UniversitySchool of Materials Science and Engineering, Peking UniversitySchool of Materials Science and Engineering, Peking UniversityKey Laboratory for the Physics and Chemistry of Nanodevices and Center for Carbon-based Electronics, Department of Electronics, Peking UniversitySchool of Materials Science and Engineering, Peking UniversityBeijing Science and Engineering Center for Nanocarbons, Beijing National Laboratory for Molecular Sciences, College of Chemistry and Molecular Engineering, Peking UniversityExperimental Center of Advanced Materials School of Materials Science & Engineering, Beijing Institute of TechnologyKey Laboratory for the Physics and Chemistry of Nanodevices and Center for Carbon-based Electronics, Department of Electronics, Peking UniversitySchool of Materials Science and Engineering, Peking UniversitySchool of Materials Science and Engineering, Peking UniversityState Key Laboratory of Nuclear Physics and Technology, School of Physics, Peking UniversitySchool of Materials Science and Engineering, Peking UniversityAbstract In the realm of modern materials science, horizontally aligned carbon nanotube arrays stand as promising materials for the development of next-generation integrated circuits. However, their large-scale integration has been impeded by the constraints of current fabrication techniques, which struggle to achieve the necessary uniformity, density, and size control of carbon nanotube arrays. Overcoming this challenge necessitates a significant shift in fabrication approaches. Herein, we present a nano-seeding method that revolutionized the preparation of catalyst nanoparticles, crucial for carbon-nanotube-array synthesis. Our approach, underpinned by ion implantation and substrate processing, allows for precise control over catalyst formation. Further development of a vertical spraying chemical vapor deposition system homogenizes the gas flow and ensures the uniform growth of carbon nanotube arrays. This nano-seeding method culminates in the direct growth of one-inch carbon-nanotube-array wafers with the highest density of 140 tubes μm−1. The high density and uniformity of the as-prepared carbon-nanotube-array wafers are validated through an advanced high-throughput characterization technique. The electrical properties of high on-state current, high on/off ratio and low subthreshold swing are demonstrated in field-effect transistors based on the arrays. This study propels the scalability of carbon-nanotube-array fabrication for future carbon-based electronics.https://doi.org/10.1038/s41467-024-55515-0 |
| spellingShingle | Ying Xie Yue Li Zhisheng Peng Chengyu Wang Zanlin Qiu Xinyi Cai Tinglu Song Jia Si Xiaoxu Zhao Liu Qian Ziqiang Zhao Jin Zhang Nano-seeding catalysts for high-density arrays of horizontally aligned carbon nanotubes with wafer-scale uniformity Nature Communications |
| title | Nano-seeding catalysts for high-density arrays of horizontally aligned carbon nanotubes with wafer-scale uniformity |
| title_full | Nano-seeding catalysts for high-density arrays of horizontally aligned carbon nanotubes with wafer-scale uniformity |
| title_fullStr | Nano-seeding catalysts for high-density arrays of horizontally aligned carbon nanotubes with wafer-scale uniformity |
| title_full_unstemmed | Nano-seeding catalysts for high-density arrays of horizontally aligned carbon nanotubes with wafer-scale uniformity |
| title_short | Nano-seeding catalysts for high-density arrays of horizontally aligned carbon nanotubes with wafer-scale uniformity |
| title_sort | nano seeding catalysts for high density arrays of horizontally aligned carbon nanotubes with wafer scale uniformity |
| url | https://doi.org/10.1038/s41467-024-55515-0 |
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