Adaptive beam-shaping enabled high-precision patterned laser micro-grooving

Microgrooves with diverse cross-sections are required in various fields but remain a significant challenge in precision machining, especially for hard-to-machine materials. Patterned laser ablation offers an avenue for fabricating microgrooves on any material with notably enhanced shape diversity. H...

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Main Authors: Pei Qiu, Jun Li, Dandan Yuan, Zixuan Xin, Jiaxu Huang, Shaolin Xu
Format: Article
Language:English
Published: IOP Publishing 2025-01-01
Series:International Journal of Extreme Manufacturing
Subjects:
Online Access:https://doi.org/10.1088/2631-7990/adec26
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author Pei Qiu
Jun Li
Dandan Yuan
Zixuan Xin
Jiaxu Huang
Shaolin Xu
author_facet Pei Qiu
Jun Li
Dandan Yuan
Zixuan Xin
Jiaxu Huang
Shaolin Xu
author_sort Pei Qiu
collection DOAJ
description Microgrooves with diverse cross-sections are required in various fields but remain a significant challenge in precision machining, especially for hard-to-machine materials. Patterned laser ablation offers an avenue for fabricating microgrooves on any material with notably enhanced shape diversity. However, it is hard to precisely control the grooves’ cross-sectional profiles due to the complex ablation process, including the diffraction-induced energy distribution variations away from the focal plane and the inconsistent polarization-related energy absorption. These factors complicate the relationship between beam spot shape and ablated groove shape, making it challenging to design appropriate spot shapes for specific groove requirements. Here, we propose an adaptive beam-shaping method for laser spot design to improve microgrooves’ shape accuracy. Combining laser diffraction and polarization effects, a profile evolution model of the laser ablation is established to accurately predict groove shapes, guiding the iterative beam-shaping procedure. The beam spot shape is iteratively fine-tuned until the deviation between the simulated and the target grooves’ profile meets the accuracy requirements. The grooves’ profile deviations are significantly reduced, with the final profile’s root mean square error decreased to less than 0.5 μm when processing microgrooves with a width of 10 μm. Various microgrooves with precise cross-sections, including triangles, trapezoids, and functionally contoured microstructures, are achieved by patterned laser direct writing assisted with the adaptive beam-shaping method. This method paves the way for laser ablation of microgrooves with high shape accuracy for traditional hard-to-machine materials.
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institution Kabale University
issn 2631-7990
language English
publishDate 2025-01-01
publisher IOP Publishing
record_format Article
series International Journal of Extreme Manufacturing
spelling doaj-art-36f2dd67609d44c6b67181fa3f325d392025-08-20T03:30:33ZengIOP PublishingInternational Journal of Extreme Manufacturing2631-79902025-01-017606500210.1088/2631-7990/adec26Adaptive beam-shaping enabled high-precision patterned laser micro-groovingPei Qiu0https://orcid.org/0000-0001-9968-8690Jun Li1https://orcid.org/0000-0002-6928-5249Dandan Yuan2Zixuan Xin3Jiaxu Huang4Shaolin Xu5https://orcid.org/0000-0003-1697-0346Department of Mechanical and Energy Engineering, Southern University of Science and Technology , Shenzhen 518055, People’s Republic of ChinaDepartment of Mechanical and Energy Engineering, Southern University of Science and Technology , Shenzhen 518055, People’s Republic of ChinaDepartment of Mechanical and Energy Engineering, Southern University of Science and Technology , Shenzhen 518055, People’s Republic of ChinaDepartment of Mechanical and Energy Engineering, Southern University of Science and Technology , Shenzhen 518055, People’s Republic of ChinaDepartment of Mechanical and Energy Engineering, Southern University of Science and Technology , Shenzhen 518055, People’s Republic of ChinaDepartment of Mechanical and Energy Engineering, Southern University of Science and Technology , Shenzhen 518055, People’s Republic of ChinaMicrogrooves with diverse cross-sections are required in various fields but remain a significant challenge in precision machining, especially for hard-to-machine materials. Patterned laser ablation offers an avenue for fabricating microgrooves on any material with notably enhanced shape diversity. However, it is hard to precisely control the grooves’ cross-sectional profiles due to the complex ablation process, including the diffraction-induced energy distribution variations away from the focal plane and the inconsistent polarization-related energy absorption. These factors complicate the relationship between beam spot shape and ablated groove shape, making it challenging to design appropriate spot shapes for specific groove requirements. Here, we propose an adaptive beam-shaping method for laser spot design to improve microgrooves’ shape accuracy. Combining laser diffraction and polarization effects, a profile evolution model of the laser ablation is established to accurately predict groove shapes, guiding the iterative beam-shaping procedure. The beam spot shape is iteratively fine-tuned until the deviation between the simulated and the target grooves’ profile meets the accuracy requirements. The grooves’ profile deviations are significantly reduced, with the final profile’s root mean square error decreased to less than 0.5 μm when processing microgrooves with a width of 10 μm. Various microgrooves with precise cross-sections, including triangles, trapezoids, and functionally contoured microstructures, are achieved by patterned laser direct writing assisted with the adaptive beam-shaping method. This method paves the way for laser ablation of microgrooves with high shape accuracy for traditional hard-to-machine materials.https://doi.org/10.1088/2631-7990/adec26laser ablationpatterned laseradaptive beam-shapingablation profile evolutionmicrogrooves
spellingShingle Pei Qiu
Jun Li
Dandan Yuan
Zixuan Xin
Jiaxu Huang
Shaolin Xu
Adaptive beam-shaping enabled high-precision patterned laser micro-grooving
International Journal of Extreme Manufacturing
laser ablation
patterned laser
adaptive beam-shaping
ablation profile evolution
microgrooves
title Adaptive beam-shaping enabled high-precision patterned laser micro-grooving
title_full Adaptive beam-shaping enabled high-precision patterned laser micro-grooving
title_fullStr Adaptive beam-shaping enabled high-precision patterned laser micro-grooving
title_full_unstemmed Adaptive beam-shaping enabled high-precision patterned laser micro-grooving
title_short Adaptive beam-shaping enabled high-precision patterned laser micro-grooving
title_sort adaptive beam shaping enabled high precision patterned laser micro grooving
topic laser ablation
patterned laser
adaptive beam-shaping
ablation profile evolution
microgrooves
url https://doi.org/10.1088/2631-7990/adec26
work_keys_str_mv AT peiqiu adaptivebeamshapingenabledhighprecisionpatternedlasermicrogrooving
AT junli adaptivebeamshapingenabledhighprecisionpatternedlasermicrogrooving
AT dandanyuan adaptivebeamshapingenabledhighprecisionpatternedlasermicrogrooving
AT zixuanxin adaptivebeamshapingenabledhighprecisionpatternedlasermicrogrooving
AT jiaxuhuang adaptivebeamshapingenabledhighprecisionpatternedlasermicrogrooving
AT shaolinxu adaptivebeamshapingenabledhighprecisionpatternedlasermicrogrooving