Microelectromechanical System Resonant Devices: A Guide for Design, Modeling and Testing

Microelectromechanical System Resonant Devices: A Guide for Design, Modeling and Testing

Microelectromechanical systems (MEMSs) are attracting increasing interest from the scientific community for the large variety of possible applications and for the continuous request from the market to improve performances, while keeping small dimensions and reduced costs. To be able to simulate a pr...

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Bibliographic Details
Main Authors: Carolina Viola, Davide Pavesi, Lichen Weng, Giorgio Gobat, Federico Maspero, Valentina Zega
Format: Article
Language:English
Published: MDPI AG 2024-11-01
Series:Micromachines
Subjects:
resonant MEMS
numerical modeling
design
Online Access:https://www.mdpi.com/2072-666X/15/12/1461
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