Microelectromechanical System Resonant Devices: A Guide for Design, Modeling and Testing
Microelectromechanical systems (MEMSs) are attracting increasing interest from the scientific community for the large variety of possible applications and for the continuous request from the market to improve performances, while keeping small dimensions and reduced costs. To be able to simulate a pr...
Saved in:
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-11-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/15/12/1461 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1850102729257517056 |
|---|---|
| author | Carolina Viola Davide Pavesi Lichen Weng Giorgio Gobat Federico Maspero Valentina Zega |
| author_facet | Carolina Viola Davide Pavesi Lichen Weng Giorgio Gobat Federico Maspero Valentina Zega |
| author_sort | Carolina Viola |
| collection | DOAJ |
| description | Microelectromechanical systems (MEMSs) are attracting increasing interest from the scientific community for the large variety of possible applications and for the continuous request from the market to improve performances, while keeping small dimensions and reduced costs. To be able to simulate a priori and in real time the dynamic response of resonant devices is then crucial to guide the mechanical design and to support the MEMSs industry. In this work, we propose a simplified modeling procedure able to reproduce the nonlinear dynamics of MEMS resonant devices of arbitrary geometry. We validate it through the fabrication and testing of a cantilever beam resonator functioning in the nonlinear regime and we employ it to design a ring resonator working in the linear regime. Despite the uncertainties of a fabrication process available in the university facility, we demonstrate the predictability of the model and the effectiveness of the proposed design procedure. The satisfactory agreement between numerical predictions and experimental data proves indeed the proposed a priori design tool based on reduced-order numerical models and opens the way to its practical applications in the MEMS industry. |
| format | Article |
| id | doaj-art-35e729566be2474db6b79b8bbd1176f4 |
| institution | DOAJ |
| issn | 2072-666X |
| language | English |
| publishDate | 2024-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj-art-35e729566be2474db6b79b8bbd1176f42025-08-20T02:39:41ZengMDPI AGMicromachines2072-666X2024-11-011512146110.3390/mi15121461Microelectromechanical System Resonant Devices: A Guide for Design, Modeling and TestingCarolina Viola0Davide Pavesi1Lichen Weng2Giorgio Gobat3Federico Maspero4Valentina Zega5Civil and Environmental Engineering Department, Politecnico di Milano, Piazza Leonardo da Vinci 32, 20133 Milano, ItalyCivil and Environmental Engineering Department, Politecnico di Milano, Piazza Leonardo da Vinci 32, 20133 Milano, ItalyCivil and Environmental Engineering Department, Politecnico di Milano, Piazza Leonardo da Vinci 32, 20133 Milano, ItalyCivil and Environmental Engineering Department, Politecnico di Milano, Piazza Leonardo da Vinci 32, 20133 Milano, ItalyPhysics Department, Politecnico di Milano, Piazza Leonardo da Vinci 32, 20133 Milano, ItalyCivil and Environmental Engineering Department, Politecnico di Milano, Piazza Leonardo da Vinci 32, 20133 Milano, ItalyMicroelectromechanical systems (MEMSs) are attracting increasing interest from the scientific community for the large variety of possible applications and for the continuous request from the market to improve performances, while keeping small dimensions and reduced costs. To be able to simulate a priori and in real time the dynamic response of resonant devices is then crucial to guide the mechanical design and to support the MEMSs industry. In this work, we propose a simplified modeling procedure able to reproduce the nonlinear dynamics of MEMS resonant devices of arbitrary geometry. We validate it through the fabrication and testing of a cantilever beam resonator functioning in the nonlinear regime and we employ it to design a ring resonator working in the linear regime. Despite the uncertainties of a fabrication process available in the university facility, we demonstrate the predictability of the model and the effectiveness of the proposed design procedure. The satisfactory agreement between numerical predictions and experimental data proves indeed the proposed a priori design tool based on reduced-order numerical models and opens the way to its practical applications in the MEMS industry.https://www.mdpi.com/2072-666X/15/12/1461resonant MEMSnumerical modelingdesign |
| spellingShingle | Carolina Viola Davide Pavesi Lichen Weng Giorgio Gobat Federico Maspero Valentina Zega Microelectromechanical System Resonant Devices: A Guide for Design, Modeling and Testing Micromachines resonant MEMS numerical modeling design |
| title | Microelectromechanical System Resonant Devices: A Guide for Design, Modeling and Testing |
| title_full | Microelectromechanical System Resonant Devices: A Guide for Design, Modeling and Testing |
| title_fullStr | Microelectromechanical System Resonant Devices: A Guide for Design, Modeling and Testing |
| title_full_unstemmed | Microelectromechanical System Resonant Devices: A Guide for Design, Modeling and Testing |
| title_short | Microelectromechanical System Resonant Devices: A Guide for Design, Modeling and Testing |
| title_sort | microelectromechanical system resonant devices a guide for design modeling and testing |
| topic | resonant MEMS numerical modeling design |
| url | https://www.mdpi.com/2072-666X/15/12/1461 |
| work_keys_str_mv | AT carolinaviola microelectromechanicalsystemresonantdevicesaguidefordesignmodelingandtesting AT davidepavesi microelectromechanicalsystemresonantdevicesaguidefordesignmodelingandtesting AT lichenweng microelectromechanicalsystemresonantdevicesaguidefordesignmodelingandtesting AT giorgiogobat microelectromechanicalsystemresonantdevicesaguidefordesignmodelingandtesting AT federicomaspero microelectromechanicalsystemresonantdevicesaguidefordesignmodelingandtesting AT valentinazega microelectromechanicalsystemresonantdevicesaguidefordesignmodelingandtesting |