Elements of solid state electronics based on soi-structures and si whiskers for cryogenic temperatures
The paper presents the study results of electrical properties of polycrystalline silicon films in silicon-on-insulator structures and Si whiskers in the temperature range of 4.2 – 70 K obtained by impedance measurements in the frequency range from 10 Hz to 250 kHz and the possibility of their use in...
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| Main Authors: | A. A. Druzhinin, I. P. Osrovskkii, Yu. M. Khoverko, R. N. Koretskyy |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Politehperiodika
2014-12-01
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| Series: | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
| Subjects: | |
| Online Access: | https://tkea.com.ua/index.php/journal/article/view/302 |
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