Reliable Damping Simulation of Highly Perforated Micro-Electro-Mechanical Systems through Physical Compact Modeling
We present an approach to estimate damping in highly and irregularly perforated microplates over a wide range of pressures applying physics-based compact models implemented in a flux-conserving finite network. The models are coded in Verilog A, which allows for simulation using a standard circuit si...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-04-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/97/1/176 |
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