Reliable Damping Simulation of Highly Perforated Micro-Electro-Mechanical Systems through Physical Compact Modeling
We present an approach to estimate damping in highly and irregularly perforated microplates over a wide range of pressures applying physics-based compact models implemented in a flux-conserving finite network. The models are coded in Verilog A, which allows for simulation using a standard circuit si...
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| Format: | Article |
| Language: | English |
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MDPI AG
2024-04-01
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| Series: | Proceedings |
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| Online Access: | https://www.mdpi.com/2504-3900/97/1/176 |
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| author | Friederike Michael Barbara Leikam Gabriele Schrag |
| author_facet | Friederike Michael Barbara Leikam Gabriele Schrag |
| author_sort | Friederike Michael |
| collection | DOAJ |
| description | We present an approach to estimate damping in highly and irregularly perforated microplates over a wide range of pressures applying physics-based compact models implemented in a flux-conserving finite network. The models are coded in Verilog A, which allows for simulation using a standard circuit simulator. This provides an efficient and customizable way to determine damping beyond the state of the art, and thus, to tailor and design the dynamic operation of MEMS in a predictive manner. |
| format | Article |
| id | doaj-art-31f39abcf3844cf094b3f2d72e239a18 |
| institution | DOAJ |
| issn | 2504-3900 |
| language | English |
| publishDate | 2024-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Proceedings |
| spelling | doaj-art-31f39abcf3844cf094b3f2d72e239a182025-08-20T02:57:04ZengMDPI AGProceedings2504-39002024-04-0197117610.3390/proceedings2024097176Reliable Damping Simulation of Highly Perforated Micro-Electro-Mechanical Systems through Physical Compact ModelingFriederike Michael0Barbara Leikam1Gabriele Schrag2Chair of Physics of Electrotechnology, TU Munich, 80333 Munich, GermanyChair of Physics of Electrotechnology, TU Munich, 80333 Munich, GermanyChair of Physics of Electrotechnology, TU Munich, 80333 Munich, GermanyWe present an approach to estimate damping in highly and irregularly perforated microplates over a wide range of pressures applying physics-based compact models implemented in a flux-conserving finite network. The models are coded in Verilog A, which allows for simulation using a standard circuit simulator. This provides an efficient and customizable way to determine damping beyond the state of the art, and thus, to tailor and design the dynamic operation of MEMS in a predictive manner.https://www.mdpi.com/2504-3900/97/1/176transition flowfinite networkscompact modelingdamping ratio |
| spellingShingle | Friederike Michael Barbara Leikam Gabriele Schrag Reliable Damping Simulation of Highly Perforated Micro-Electro-Mechanical Systems through Physical Compact Modeling Proceedings transition flow finite networks compact modeling damping ratio |
| title | Reliable Damping Simulation of Highly Perforated Micro-Electro-Mechanical Systems through Physical Compact Modeling |
| title_full | Reliable Damping Simulation of Highly Perforated Micro-Electro-Mechanical Systems through Physical Compact Modeling |
| title_fullStr | Reliable Damping Simulation of Highly Perforated Micro-Electro-Mechanical Systems through Physical Compact Modeling |
| title_full_unstemmed | Reliable Damping Simulation of Highly Perforated Micro-Electro-Mechanical Systems through Physical Compact Modeling |
| title_short | Reliable Damping Simulation of Highly Perforated Micro-Electro-Mechanical Systems through Physical Compact Modeling |
| title_sort | reliable damping simulation of highly perforated micro electro mechanical systems through physical compact modeling |
| topic | transition flow finite networks compact modeling damping ratio |
| url | https://www.mdpi.com/2504-3900/97/1/176 |
| work_keys_str_mv | AT friederikemichael reliabledampingsimulationofhighlyperforatedmicroelectromechanicalsystemsthroughphysicalcompactmodeling AT barbaraleikam reliabledampingsimulationofhighlyperforatedmicroelectromechanicalsystemsthroughphysicalcompactmodeling AT gabrieleschrag reliabledampingsimulationofhighlyperforatedmicroelectromechanicalsystemsthroughphysicalcompactmodeling |