Effect of elastomer materials on the time response characteristics of MEMS tactile sensors
We report on the effect of elastomer materials on the time response characteristics of tactile sensors using microcantilevers embedded in the elastomer. Our previous work has shown that different electrical time response characteristics of the sensor output can be obtained using piezoelectric or res...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2025-06-01
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| Series: | Mechanical Engineering Journal |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/mej/12/4/12_25-00098/_pdf/-char/en |
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