Effect of elastomer materials on the time response characteristics of MEMS tactile sensors
We report on the effect of elastomer materials on the time response characteristics of tactile sensors using microcantilevers embedded in the elastomer. Our previous work has shown that different electrical time response characteristics of the sensor output can be obtained using piezoelectric or res...
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| Format: | Article |
| Language: | English |
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The Japan Society of Mechanical Engineers
2025-06-01
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| Series: | Mechanical Engineering Journal |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/mej/12/4/12_25-00098/_pdf/-char/en |
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| author | Yusaku AIBA Ryusuke MITOBE Akiyoshi KUSANO Akiomi USHIDA Takashi ABE Masayuki SOHGAWA |
| author_facet | Yusaku AIBA Ryusuke MITOBE Akiyoshi KUSANO Akiomi USHIDA Takashi ABE Masayuki SOHGAWA |
| author_sort | Yusaku AIBA |
| collection | DOAJ |
| description | We report on the effect of elastomer materials on the time response characteristics of tactile sensors using microcantilevers embedded in the elastomer. Our previous work has shown that different electrical time response characteristics of the sensor output can be obtained using piezoelectric or resistive elements. In this paper, focusing on mechanical time response control, we evaluated the response differences based on the viscoelasticity of the elastomer used to embed the microcantilever as a sensing element for tactile sensors. The microcantilever embedded in an acrylic elastomer, which has higher viscoelasticity than the previously used PDMS, exhibits nonlinear responses that are significantly dependent on the rate of deformation. Furthermore, we found that even when the elastomer used to embed the microcantilever is the same material, the time response characteristics vary depending on the material of the contact surface with the object. |
| format | Article |
| id | doaj-art-31092d8b95ac4964b20bd2b8ff4c4685 |
| institution | OA Journals |
| issn | 2187-9745 |
| language | English |
| publishDate | 2025-06-01 |
| publisher | The Japan Society of Mechanical Engineers |
| record_format | Article |
| series | Mechanical Engineering Journal |
| spelling | doaj-art-31092d8b95ac4964b20bd2b8ff4c46852025-08-20T01:59:35ZengThe Japan Society of Mechanical EngineersMechanical Engineering Journal2187-97452025-06-0112425-0009825-0009810.1299/mej.25-00098mejEffect of elastomer materials on the time response characteristics of MEMS tactile sensorsYusaku AIBA0Ryusuke MITOBE1Akiyoshi KUSANO2Akiomi USHIDA3Takashi ABE4Masayuki SOHGAWA5Faculty of engineering, Niigata UniversityFaculty of engineering, Niigata UniversityFaculty of engineering, Niigata UniversityFaculty of engineering, Niigata UniversityFaculty of engineering, Niigata UniversityFaculty of engineering, Niigata UniversityWe report on the effect of elastomer materials on the time response characteristics of tactile sensors using microcantilevers embedded in the elastomer. Our previous work has shown that different electrical time response characteristics of the sensor output can be obtained using piezoelectric or resistive elements. In this paper, focusing on mechanical time response control, we evaluated the response differences based on the viscoelasticity of the elastomer used to embed the microcantilever as a sensing element for tactile sensors. The microcantilever embedded in an acrylic elastomer, which has higher viscoelasticity than the previously used PDMS, exhibits nonlinear responses that are significantly dependent on the rate of deformation. Furthermore, we found that even when the elastomer used to embed the microcantilever is the same material, the time response characteristics vary depending on the material of the contact surface with the object.https://www.jstage.jst.go.jp/article/mej/12/4/12_25-00098/_pdf/-char/entactile sensorviscoelastic elastomermicrocantilevertime response characteristics |
| spellingShingle | Yusaku AIBA Ryusuke MITOBE Akiyoshi KUSANO Akiomi USHIDA Takashi ABE Masayuki SOHGAWA Effect of elastomer materials on the time response characteristics of MEMS tactile sensors Mechanical Engineering Journal tactile sensor viscoelastic elastomer microcantilever time response characteristics |
| title | Effect of elastomer materials on the time response characteristics of MEMS tactile sensors |
| title_full | Effect of elastomer materials on the time response characteristics of MEMS tactile sensors |
| title_fullStr | Effect of elastomer materials on the time response characteristics of MEMS tactile sensors |
| title_full_unstemmed | Effect of elastomer materials on the time response characteristics of MEMS tactile sensors |
| title_short | Effect of elastomer materials on the time response characteristics of MEMS tactile sensors |
| title_sort | effect of elastomer materials on the time response characteristics of mems tactile sensors |
| topic | tactile sensor viscoelastic elastomer microcantilever time response characteristics |
| url | https://www.jstage.jst.go.jp/article/mej/12/4/12_25-00098/_pdf/-char/en |
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