3-DOF Inertial Piezoelectric Actuator for Angular Positioning of the Optical Mirror
Article introduces a novel 3-DOF piezoelectric actuator designed to achieve the high-precision angular motion of a spherical rotor and an optical mirror around three axes. The actuator consists of three interlinked piezoelectric bimorph plates arranged in a low-profile triangular structure. Each pie...
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IEEE
2025-01-01
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| Online Access: | https://ieeexplore.ieee.org/document/10855440/ |
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| author | Andrius Ceponis Dalius Mazeika Regimantas Bareikis |
| author_facet | Andrius Ceponis Dalius Mazeika Regimantas Bareikis |
| author_sort | Andrius Ceponis |
| collection | DOAJ |
| description | Article introduces a novel 3-DOF piezoelectric actuator designed to achieve the high-precision angular motion of a spherical rotor and an optical mirror around three axes. The actuator consists of three interlinked piezoelectric bimorph plates arranged in a low-profile triangular structure. Each piezoelectric plate contains a cylindrical contact that is used to transfer the vibrations to induce the angular motion of the rotor. The actuator has a low profile and is mounted on a printed circuit board (PCB), enhancing its structural integrity. The actuator occupies a footprint of 986 mm2 and, including the rotor, weighs 35.5 g. The actuator operation is based on the inertial stick-slip principle, using the first and second out-of-plane bending modes of the bimorph plates. Simultaneous excitation of the second vibration mode of all three bimorph plates produces angular motion of the rotor around the vertical axis. In contrast, the excitation of the first vibration mode of the individual plate enables angular motion around one of the horizontal axes. Numerical analysis identified the vibration modes, resonant frequencies, and mechanical and electromechanical characteristics of the actuator, leading to design optimization of clamping beams and contact locations on the bimorph plates. Experimental measurements revealed that the maximum rotation speeds are 363.7 RPM around the vertical axis and 129.1 RPM around the horizontal axis. Maximum torques of 218.2 mN/m and 159.7 mN/m were achieved around the vertical and horizontal axes, respectively, when the actuator is driven at 200 V<inline-formula> <tex-math notation="LaTeX">$_{\mathrm {p-p}}$ </tex-math></inline-formula>. The actuator demonstrated angular resolutions of 2.47 mrad and 1.033 mrad for the vertical and horizontal axes, respectively. |
| format | Article |
| id | doaj-art-2e2bba93aaf14511b0b10d99355a355d |
| institution | Kabale University |
| issn | 2169-3536 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Access |
| spelling | doaj-art-2e2bba93aaf14511b0b10d99355a355d2025-01-31T23:05:22ZengIEEEIEEE Access2169-35362025-01-0113200252003910.1109/ACCESS.2025.3534847108554403-DOF Inertial Piezoelectric Actuator for Angular Positioning of the Optical MirrorAndrius Ceponis0https://orcid.org/0000-0002-4558-1537Dalius Mazeika1Regimantas Bareikis2Institute of Mechanical Science, Faculty of Mechanics, Vilnius Gediminas Technical University, Vilnius, LithuaniaDepartment of Information Systems, Faculty of Fundamental Sciences, Vilnius Gediminas Technical University, Vilnius, LithuaniaResearch Institute of Natural and Technological Sciences, Faculty of Natural Sciences, Vytautas Magnus University, Kaunas, LithuaniaArticle introduces a novel 3-DOF piezoelectric actuator designed to achieve the high-precision angular motion of a spherical rotor and an optical mirror around three axes. The actuator consists of three interlinked piezoelectric bimorph plates arranged in a low-profile triangular structure. Each piezoelectric plate contains a cylindrical contact that is used to transfer the vibrations to induce the angular motion of the rotor. The actuator has a low profile and is mounted on a printed circuit board (PCB), enhancing its structural integrity. The actuator occupies a footprint of 986 mm2 and, including the rotor, weighs 35.5 g. The actuator operation is based on the inertial stick-slip principle, using the first and second out-of-plane bending modes of the bimorph plates. Simultaneous excitation of the second vibration mode of all three bimorph plates produces angular motion of the rotor around the vertical axis. In contrast, the excitation of the first vibration mode of the individual plate enables angular motion around one of the horizontal axes. Numerical analysis identified the vibration modes, resonant frequencies, and mechanical and electromechanical characteristics of the actuator, leading to design optimization of clamping beams and contact locations on the bimorph plates. Experimental measurements revealed that the maximum rotation speeds are 363.7 RPM around the vertical axis and 129.1 RPM around the horizontal axis. Maximum torques of 218.2 mN/m and 159.7 mN/m were achieved around the vertical and horizontal axes, respectively, when the actuator is driven at 200 V<inline-formula> <tex-math notation="LaTeX">$_{\mathrm {p-p}}$ </tex-math></inline-formula>. The actuator demonstrated angular resolutions of 2.47 mrad and 1.033 mrad for the vertical and horizontal axes, respectively.https://ieeexplore.ieee.org/document/10855440/Inertial operation principleoptical mirrorpiezoelectric actuatorpiezoelectric bimorph plate |
| spellingShingle | Andrius Ceponis Dalius Mazeika Regimantas Bareikis 3-DOF Inertial Piezoelectric Actuator for Angular Positioning of the Optical Mirror IEEE Access Inertial operation principle optical mirror piezoelectric actuator piezoelectric bimorph plate |
| title | 3-DOF Inertial Piezoelectric Actuator for Angular Positioning of the Optical Mirror |
| title_full | 3-DOF Inertial Piezoelectric Actuator for Angular Positioning of the Optical Mirror |
| title_fullStr | 3-DOF Inertial Piezoelectric Actuator for Angular Positioning of the Optical Mirror |
| title_full_unstemmed | 3-DOF Inertial Piezoelectric Actuator for Angular Positioning of the Optical Mirror |
| title_short | 3-DOF Inertial Piezoelectric Actuator for Angular Positioning of the Optical Mirror |
| title_sort | 3 dof inertial piezoelectric actuator for angular positioning of the optical mirror |
| topic | Inertial operation principle optical mirror piezoelectric actuator piezoelectric bimorph plate |
| url | https://ieeexplore.ieee.org/document/10855440/ |
| work_keys_str_mv | AT andriusceponis 3dofinertialpiezoelectricactuatorforangularpositioningoftheopticalmirror AT daliusmazeika 3dofinertialpiezoelectricactuatorforangularpositioningoftheopticalmirror AT regimantasbareikis 3dofinertialpiezoelectricactuatorforangularpositioningoftheopticalmirror |