Multi-Parameter Optimization of a Shallow Ridge InP Traveling Wave Mach-Zehnder Modulator for Beyond 200 Gb/s Optical Datacom Applications
We present multi-parameter optimization of a shallow ridge InP-based traveling wave Mach-Zehnder modulator (MZM) for ultra-wide modulation bandwidth by velocity and impedance matching and microwave attenuation minimization. Relationship between MZM microwave loss and p-cladding layer doping profile...
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| Format: | Article |
| Language: | English |
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IEEE
2023-01-01
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| Series: | IEEE Photonics Journal |
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| Online Access: | https://ieeexplore.ieee.org/document/10143639/ |
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| author | Ruoyun Yao Wanshu Xiong Zhangwan Peng Weiwei Pan Xiaojun Ying Yili Liu Yiti Xiong Chen Ji |
| author_facet | Ruoyun Yao Wanshu Xiong Zhangwan Peng Weiwei Pan Xiaojun Ying Yili Liu Yiti Xiong Chen Ji |
| author_sort | Ruoyun Yao |
| collection | DOAJ |
| description | We present multi-parameter optimization of a shallow ridge InP-based traveling wave Mach-Zehnder modulator (MZM) for ultra-wide modulation bandwidth by velocity and impedance matching and microwave attenuation minimization. Relationship between MZM microwave loss and p-cladding layer doping profile is quantitatively analyzed and incorporated in device optimization. We propose a systematic analysis methodology allowing the full optimization of an InP shallow ridge MZM capable of 200 Gb/s PAM4 operation, compatible with high-volume low-cost manufacturing. Our design is expected to achieve 4.3 V half-wave voltage and 81 GHz 3-dB bandwidth with simplified fabrication process and improved long-term reliability. |
| format | Article |
| id | doaj-art-2d928ec2ea534d0694793071bf7294cd |
| institution | OA Journals |
| issn | 1943-0655 |
| language | English |
| publishDate | 2023-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Photonics Journal |
| spelling | doaj-art-2d928ec2ea534d0694793071bf7294cd2025-08-20T02:38:36ZengIEEEIEEE Photonics Journal1943-06552023-01-011531710.1109/JPHOT.2023.328265110143639Multi-Parameter Optimization of a Shallow Ridge InP Traveling Wave Mach-Zehnder Modulator for Beyond 200 Gb/s Optical Datacom ApplicationsRuoyun Yao0https://orcid.org/0000-0002-4321-5584Wanshu Xiong1https://orcid.org/0000-0003-4307-2816Zhangwan Peng2https://orcid.org/0009-0000-0191-8911Weiwei Pan3Xiaojun Ying4https://orcid.org/0009-0001-6408-4771Yili Liu5Yiti Xiong6https://orcid.org/0009-0007-8056-7355Chen Ji7College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, ChinaCollege of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, ChinaCollege of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, ChinaCollege of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, ChinaResearch Institute of Intelligent Networks, Zhejiang Lab, Hangzhou, ChinaResearch Institute of Intelligent Networks, Zhejiang Lab, Hangzhou, ChinaResearch Institute of Intelligent Networks, Zhejiang Lab, Hangzhou, ChinaCollege of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, ChinaWe present multi-parameter optimization of a shallow ridge InP-based traveling wave Mach-Zehnder modulator (MZM) for ultra-wide modulation bandwidth by velocity and impedance matching and microwave attenuation minimization. Relationship between MZM microwave loss and p-cladding layer doping profile is quantitatively analyzed and incorporated in device optimization. We propose a systematic analysis methodology allowing the full optimization of an InP shallow ridge MZM capable of 200 Gb/s PAM4 operation, compatible with high-volume low-cost manufacturing. Our design is expected to achieve 4.3 V half-wave voltage and 81 GHz 3-dB bandwidth with simplified fabrication process and improved long-term reliability.https://ieeexplore.ieee.org/document/10143639/High-speedInPMach-Zehnder modulatorshallow ridgetraveling wave |
| spellingShingle | Ruoyun Yao Wanshu Xiong Zhangwan Peng Weiwei Pan Xiaojun Ying Yili Liu Yiti Xiong Chen Ji Multi-Parameter Optimization of a Shallow Ridge InP Traveling Wave Mach-Zehnder Modulator for Beyond 200 Gb/s Optical Datacom Applications IEEE Photonics Journal High-speed InP Mach-Zehnder modulator shallow ridge traveling wave |
| title | Multi-Parameter Optimization of a Shallow Ridge InP Traveling Wave Mach-Zehnder Modulator for Beyond 200 Gb/s Optical Datacom Applications |
| title_full | Multi-Parameter Optimization of a Shallow Ridge InP Traveling Wave Mach-Zehnder Modulator for Beyond 200 Gb/s Optical Datacom Applications |
| title_fullStr | Multi-Parameter Optimization of a Shallow Ridge InP Traveling Wave Mach-Zehnder Modulator for Beyond 200 Gb/s Optical Datacom Applications |
| title_full_unstemmed | Multi-Parameter Optimization of a Shallow Ridge InP Traveling Wave Mach-Zehnder Modulator for Beyond 200 Gb/s Optical Datacom Applications |
| title_short | Multi-Parameter Optimization of a Shallow Ridge InP Traveling Wave Mach-Zehnder Modulator for Beyond 200 Gb/s Optical Datacom Applications |
| title_sort | multi parameter optimization of a shallow ridge inp traveling wave mach zehnder modulator for beyond 200 gb x002f s optical datacom applications |
| topic | High-speed InP Mach-Zehnder modulator shallow ridge traveling wave |
| url | https://ieeexplore.ieee.org/document/10143639/ |
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