Hysteresis Compensation and Butterworth Pattern-Based Positive Acceleration Velocity Position Feedback Damping Control of a Tip-Tilt-Piston Piezoelectric Stage
In order to solve the hysteresis nonlinearity and resonance problems of piezoelectric stages, this paper takes a three-degree-of-freedom tip-tilt-piston piezoelectric stage as the object, compensates for the hysteresis nonlinearity through inverse hysteresis model feedforward control, and then combi...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-11-01
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| Series: | Actuators |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-0825/13/12/468 |
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