Influence of polarization coulomb field scattering on the subthreshold swing in E-mode p-GaN/AlGaN/GaN HEMTs

In the present study, p-GaN/AlGaN/GaN HEMTs treated with hydrogen plasma passivation were fabricated. Capacitance–voltage (C-V) and current–voltage(I-V) characteristics of these devices were subsequently measured. The relationship between polarization Coulomb field (PCF) scattering and the subthresh...

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Main Authors: Heyu Liu, Mingyan Wang, Heng Zhou, Guohao Yu, Honghuan Guo, Baoshun Zhang, Peng Cui, Zhaojun Lin
Format: Article
Language:English
Published: IOP Publishing 2025-01-01
Series:Journal of Physics Communications
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Online Access:https://doi.org/10.1088/2399-6528/add5b8
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_version_ 1849387433821470720
author Heyu Liu
Mingyan Wang
Heng Zhou
Guohao Yu
Honghuan Guo
Baoshun Zhang
Peng Cui
Zhaojun Lin
author_facet Heyu Liu
Mingyan Wang
Heng Zhou
Guohao Yu
Honghuan Guo
Baoshun Zhang
Peng Cui
Zhaojun Lin
author_sort Heyu Liu
collection DOAJ
description In the present study, p-GaN/AlGaN/GaN HEMTs treated with hydrogen plasma passivation were fabricated. Capacitance–voltage (C-V) and current–voltage(I-V) characteristics of these devices were subsequently measured. The relationship between polarization Coulomb field (PCF) scattering and the subthreshold swing(SS) for E-mode p-GaN/AlGaN/GaN was investigated. The two-dimensional electron gas (2DEG) concentration beneath the gate-source (G-S) and gate-drain (G-D) regions of the p-GaN HEMT was calculated at zero gate bias voltage using TCAD software. By integrating measured I-V and C-V data, the 2DEG concentration was determined for various gate bias voltages, facilitating iterative calculations to derive additional parameters such as polarization charge and electron mobility. The calculation results show that for the E-mode GaN HEMT, the PCF was gradually weakened as the additional polarization charge decreased with the increase in V _GS . Moreover, for the devices with stronger PCF scattering, the value of the SS was smaller, and the SS value was reduced by over 60%.
format Article
id doaj-art-2d0de4f67fc2447aa2fce90290c6b7f6
institution Kabale University
issn 2399-6528
language English
publishDate 2025-01-01
publisher IOP Publishing
record_format Article
series Journal of Physics Communications
spelling doaj-art-2d0de4f67fc2447aa2fce90290c6b7f62025-08-20T03:53:51ZengIOP PublishingJournal of Physics Communications2399-65282025-01-019505500410.1088/2399-6528/add5b8Influence of polarization coulomb field scattering on the subthreshold swing in E-mode p-GaN/AlGaN/GaN HEMTsHeyu Liu0https://orcid.org/0009-0006-6946-6986Mingyan Wang1https://orcid.org/0000-0002-1305-226XHeng Zhou2https://orcid.org/0000-0001-8790-5870Guohao Yu3https://orcid.org/0000-0002-6921-2728Honghuan Guo4Baoshun Zhang5Peng Cui6https://orcid.org/0000-0002-7120-1294Zhaojun Lin7https://orcid.org/0000-0001-6590-9627School of Integrated Circuits, Institute of Novel Semiconductors Shandong University , Jinan 250100, People’s Republic of ChinaSchool of Integrated Circuits, Institute of Novel Semiconductors Shandong University , Jinan 250100, People’s Republic of ChinaSchool of Integrated Circuits, Institute of Novel Semiconductors Shandong University , Jinan 250100, People’s Republic of ChinaKey Laboratory of Nanodevices and applications, Suzhou institute of Nano-tech and Nano-bionics , CAS, Suzhou 215123, People’s Republic of ChinaSchool of Integrated Circuits, Institute of Novel Semiconductors Shandong University , Jinan 250100, People’s Republic of ChinaKey Laboratory of Nanodevices and applications, Suzhou institute of Nano-tech and Nano-bionics , CAS, Suzhou 215123, People’s Republic of ChinaInstitute of Novel Semiconductors, Shandong University , Jinan 250100, People’s Republic of ChinaSchool of Integrated Circuits, Institute of Novel Semiconductors Shandong University , Jinan 250100, People’s Republic of ChinaIn the present study, p-GaN/AlGaN/GaN HEMTs treated with hydrogen plasma passivation were fabricated. Capacitance–voltage (C-V) and current–voltage(I-V) characteristics of these devices were subsequently measured. The relationship between polarization Coulomb field (PCF) scattering and the subthreshold swing(SS) for E-mode p-GaN/AlGaN/GaN was investigated. The two-dimensional electron gas (2DEG) concentration beneath the gate-source (G-S) and gate-drain (G-D) regions of the p-GaN HEMT was calculated at zero gate bias voltage using TCAD software. By integrating measured I-V and C-V data, the 2DEG concentration was determined for various gate bias voltages, facilitating iterative calculations to derive additional parameters such as polarization charge and electron mobility. The calculation results show that for the E-mode GaN HEMT, the PCF was gradually weakened as the additional polarization charge decreased with the increase in V _GS . Moreover, for the devices with stronger PCF scattering, the value of the SS was smaller, and the SS value was reduced by over 60%.https://doi.org/10.1088/2399-6528/add5b82DEGenhancement modeTCADsubthreshold swingp-GaN/AlGaN/GaN HEMTelectron mobility
spellingShingle Heyu Liu
Mingyan Wang
Heng Zhou
Guohao Yu
Honghuan Guo
Baoshun Zhang
Peng Cui
Zhaojun Lin
Influence of polarization coulomb field scattering on the subthreshold swing in E-mode p-GaN/AlGaN/GaN HEMTs
Journal of Physics Communications
2DEG
enhancement mode
TCAD
subthreshold swing
p-GaN/AlGaN/GaN HEMT
electron mobility
title Influence of polarization coulomb field scattering on the subthreshold swing in E-mode p-GaN/AlGaN/GaN HEMTs
title_full Influence of polarization coulomb field scattering on the subthreshold swing in E-mode p-GaN/AlGaN/GaN HEMTs
title_fullStr Influence of polarization coulomb field scattering on the subthreshold swing in E-mode p-GaN/AlGaN/GaN HEMTs
title_full_unstemmed Influence of polarization coulomb field scattering on the subthreshold swing in E-mode p-GaN/AlGaN/GaN HEMTs
title_short Influence of polarization coulomb field scattering on the subthreshold swing in E-mode p-GaN/AlGaN/GaN HEMTs
title_sort influence of polarization coulomb field scattering on the subthreshold swing in e mode p gan algan gan hemts
topic 2DEG
enhancement mode
TCAD
subthreshold swing
p-GaN/AlGaN/GaN HEMT
electron mobility
url https://doi.org/10.1088/2399-6528/add5b8
work_keys_str_mv AT heyuliu influenceofpolarizationcoulombfieldscatteringonthesubthresholdswinginemodepganalganganhemts
AT mingyanwang influenceofpolarizationcoulombfieldscatteringonthesubthresholdswinginemodepganalganganhemts
AT hengzhou influenceofpolarizationcoulombfieldscatteringonthesubthresholdswinginemodepganalganganhemts
AT guohaoyu influenceofpolarizationcoulombfieldscatteringonthesubthresholdswinginemodepganalganganhemts
AT honghuanguo influenceofpolarizationcoulombfieldscatteringonthesubthresholdswinginemodepganalganganhemts
AT baoshunzhang influenceofpolarizationcoulombfieldscatteringonthesubthresholdswinginemodepganalganganhemts
AT pengcui influenceofpolarizationcoulombfieldscatteringonthesubthresholdswinginemodepganalganganhemts
AT zhaojunlin influenceofpolarizationcoulombfieldscatteringonthesubthresholdswinginemodepganalganganhemts