Research on Single-Event Effect Hardening Method of Transverse Split-Gate Trench Metal-Oxide-Semiconductor Field-Effect Transistors

In this work, the single-event burnout (SEB) effect and degradation behaviors induced by heavy-ion irradiation are investigated in a 120 V-rated transverse split-gate trench (TSGT) power metal-oxide-semiconductor field-effect transistor (MOSFET). Bismuth heavy-ions are used to conduct heavy-ion irra...

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Main Authors: Mengtian Bao, Ying Wang, Jianqun Yang, Xingji Li
Format: Article
Language:English
Published: MDPI AG 2025-03-01
Series:Micromachines
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Online Access:https://www.mdpi.com/2072-666X/16/4/417
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author Mengtian Bao
Ying Wang
Jianqun Yang
Xingji Li
author_facet Mengtian Bao
Ying Wang
Jianqun Yang
Xingji Li
author_sort Mengtian Bao
collection DOAJ
description In this work, the single-event burnout (SEB) effect and degradation behaviors induced by heavy-ion irradiation are investigated in a 120 V-rated transverse split-gate trench (TSGT) power metal-oxide-semiconductor field-effect transistor (MOSFET). Bismuth heavy-ions are used to conduct heavy-ion irradiation tests. The experimental results show that the SEB failure threshold voltage (<i>V</i><sub>SEB</sub>) of the tested sample is 72 V, which only accounts for 52.6% of the actual breakdown voltage of the device. The <i>V</i><sub>SEB</sub> value decreased with the increase in the flux. The simulation results show that the local “hot spot” formed after the incident heavy ion is an important reason for the drain current degradation of TSGT MOSFETs. To improve the single-event effect tolerance of TSGT MOSFETs, an SEB hardening method based on process optimization is proposed in this paper, which does not require additional customized epitaxial wafers. The simulation results show that, after SEB hardening, the <i>V</i><sub>SEB</sub> is increased to 115 V, which accounts for 89.1% of the breakdown voltage.
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spelling doaj-art-2cffca252b344a94a80ebfbe38faf0e52025-08-20T02:18:04ZengMDPI AGMicromachines2072-666X2025-03-0116441710.3390/mi16040417Research on Single-Event Effect Hardening Method of Transverse Split-Gate Trench Metal-Oxide-Semiconductor Field-Effect TransistorsMengtian Bao0Ying Wang1Jianqun Yang2Xingji Li3School of Electronic Information, Huzhou College, Huzhou 313000, ChinaInformation Science and Technology College, Dalian Maritime University, Dalian 116026, ChinaNational Key Laboratory of Materials Behavior and Evaluation Technology in Space Environment, Harbin Institute of Technology, Harbin 150080, ChinaNational Key Laboratory of Materials Behavior and Evaluation Technology in Space Environment, Harbin Institute of Technology, Harbin 150080, ChinaIn this work, the single-event burnout (SEB) effect and degradation behaviors induced by heavy-ion irradiation are investigated in a 120 V-rated transverse split-gate trench (TSGT) power metal-oxide-semiconductor field-effect transistor (MOSFET). Bismuth heavy-ions are used to conduct heavy-ion irradiation tests. The experimental results show that the SEB failure threshold voltage (<i>V</i><sub>SEB</sub>) of the tested sample is 72 V, which only accounts for 52.6% of the actual breakdown voltage of the device. The <i>V</i><sub>SEB</sub> value decreased with the increase in the flux. The simulation results show that the local “hot spot” formed after the incident heavy ion is an important reason for the drain current degradation of TSGT MOSFETs. To improve the single-event effect tolerance of TSGT MOSFETs, an SEB hardening method based on process optimization is proposed in this paper, which does not require additional customized epitaxial wafers. The simulation results show that, after SEB hardening, the <i>V</i><sub>SEB</sub> is increased to 115 V, which accounts for 89.1% of the breakdown voltage.https://www.mdpi.com/2072-666X/16/4/417power MOSFETsingle-event effectSEB hardeningprocess optimization
spellingShingle Mengtian Bao
Ying Wang
Jianqun Yang
Xingji Li
Research on Single-Event Effect Hardening Method of Transverse Split-Gate Trench Metal-Oxide-Semiconductor Field-Effect Transistors
Micromachines
power MOSFET
single-event effect
SEB hardening
process optimization
title Research on Single-Event Effect Hardening Method of Transverse Split-Gate Trench Metal-Oxide-Semiconductor Field-Effect Transistors
title_full Research on Single-Event Effect Hardening Method of Transverse Split-Gate Trench Metal-Oxide-Semiconductor Field-Effect Transistors
title_fullStr Research on Single-Event Effect Hardening Method of Transverse Split-Gate Trench Metal-Oxide-Semiconductor Field-Effect Transistors
title_full_unstemmed Research on Single-Event Effect Hardening Method of Transverse Split-Gate Trench Metal-Oxide-Semiconductor Field-Effect Transistors
title_short Research on Single-Event Effect Hardening Method of Transverse Split-Gate Trench Metal-Oxide-Semiconductor Field-Effect Transistors
title_sort research on single event effect hardening method of transverse split gate trench metal oxide semiconductor field effect transistors
topic power MOSFET
single-event effect
SEB hardening
process optimization
url https://www.mdpi.com/2072-666X/16/4/417
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AT jianqunyang researchonsingleeventeffecthardeningmethodoftransversesplitgatetrenchmetaloxidesemiconductorfieldeffecttransistors
AT xingjili researchonsingleeventeffecthardeningmethodoftransversesplitgatetrenchmetaloxidesemiconductorfieldeffecttransistors