Formation of Diamond-Like Carbon Coatings by Chemical Deposition in High Density Plasma
A developed technological reactor for the formation of a diamond-like carbon coating on substrates up to 200 mm in diameter by chemical vapor deposition in high-density inductively coupled plasma at an operating pressure below 5 Pa is described. The results of experimental studies on obtaining a dia...
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| Format: | Article |
| Language: | Russian |
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Educational institution «Belarusian State University of Informatics and Radioelectronics»
2023-08-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
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| Online Access: | https://doklady.bsuir.by/jour/article/view/3678 |
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| author | N. V. Leonovich P. D. Tovt D. A. Kotov |
| author_facet | N. V. Leonovich P. D. Tovt D. A. Kotov |
| author_sort | N. V. Leonovich |
| collection | DOAJ |
| description | A developed technological reactor for the formation of a diamond-like carbon coating on substrates up to 200 mm in diameter by chemical vapor deposition in high-density inductively coupled plasma at an operating pressure below 5 Pa is described. The results of experimental studies on obtaining a diamond-like carbon coating in the developed reactor are presented. The dependences of the rate of deposition of a diamond-like carbon coating on the power of the RF discharge, the operating pressure, and the consumption of the film-forming gaseous reagent have been established. Also, for the developed technological reactor, the modes for obtaining diamond-like carbon coatings with the best mechanical properties were established with the following process parameters: RF power 600–900 W, precursor gas flow rate 15–50 cm3/min, the ratio of plasma-forming gas volumes to film-forming gas volume 3:1 at a residual pressure in the working chamber of not more than 4 Pa. It has been shown by Raman spectroscopy that the coatings obtained under efficient conditions contain a significant amount of a diamond-like phase. |
| format | Article |
| id | doaj-art-2cea37e7c2274ea18c4ba64b2be50d88 |
| institution | Kabale University |
| issn | 1729-7648 |
| language | Russian |
| publishDate | 2023-08-01 |
| publisher | Educational institution «Belarusian State University of Informatics and Radioelectronics» |
| record_format | Article |
| series | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| spelling | doaj-art-2cea37e7c2274ea18c4ba64b2be50d882025-08-20T04:00:33ZrusEducational institution «Belarusian State University of Informatics and Radioelectronics»Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki1729-76482023-08-01214333910.35596/1729-7648-2023-21-4-33-391917Formation of Diamond-Like Carbon Coatings by Chemical Deposition in High Density PlasmaN. V. Leonovich0P. D. Tovt1D. A. Kotov2Belarusian State University of Informatics and RadioelectronicsBelarusian State University of Informatics and RadioelectronicsBelarusian State University of Informatics and RadioelectronicsA developed technological reactor for the formation of a diamond-like carbon coating on substrates up to 200 mm in diameter by chemical vapor deposition in high-density inductively coupled plasma at an operating pressure below 5 Pa is described. The results of experimental studies on obtaining a diamond-like carbon coating in the developed reactor are presented. The dependences of the rate of deposition of a diamond-like carbon coating on the power of the RF discharge, the operating pressure, and the consumption of the film-forming gaseous reagent have been established. Also, for the developed technological reactor, the modes for obtaining diamond-like carbon coatings with the best mechanical properties were established with the following process parameters: RF power 600–900 W, precursor gas flow rate 15–50 cm3/min, the ratio of plasma-forming gas volumes to film-forming gas volume 3:1 at a residual pressure in the working chamber of not more than 4 Pa. It has been shown by Raman spectroscopy that the coatings obtained under efficient conditions contain a significant amount of a diamond-like phase.https://doklady.bsuir.by/jour/article/view/3678diamond-like carbon coatinghigh-density plasmainductively coupled plasmaraman spectroscopy |
| spellingShingle | N. V. Leonovich P. D. Tovt D. A. Kotov Formation of Diamond-Like Carbon Coatings by Chemical Deposition in High Density Plasma Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki diamond-like carbon coating high-density plasma inductively coupled plasma raman spectroscopy |
| title | Formation of Diamond-Like Carbon Coatings by Chemical Deposition in High Density Plasma |
| title_full | Formation of Diamond-Like Carbon Coatings by Chemical Deposition in High Density Plasma |
| title_fullStr | Formation of Diamond-Like Carbon Coatings by Chemical Deposition in High Density Plasma |
| title_full_unstemmed | Formation of Diamond-Like Carbon Coatings by Chemical Deposition in High Density Plasma |
| title_short | Formation of Diamond-Like Carbon Coatings by Chemical Deposition in High Density Plasma |
| title_sort | formation of diamond like carbon coatings by chemical deposition in high density plasma |
| topic | diamond-like carbon coating high-density plasma inductively coupled plasma raman spectroscopy |
| url | https://doklady.bsuir.by/jour/article/view/3678 |
| work_keys_str_mv | AT nvleonovich formationofdiamondlikecarboncoatingsbychemicaldepositioninhighdensityplasma AT pdtovt formationofdiamondlikecarboncoatingsbychemicaldepositioninhighdensityplasma AT dakotov formationofdiamondlikecarboncoatingsbychemicaldepositioninhighdensityplasma |