Miniature optical fiber accelerometer based on an in-situ 3D microprinted ferrule-top Fabry–Pérot microinterferometer
Accelerometers are crucial sensors that measure acceleration resulting from motion or vibration. Compared with their electromechanical counterparts, optical accelerometers are widely regarded as the most promising technology for high-requirement applications. However, compact integration of various...
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| Format: | Article |
| Language: | English |
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Light Publishing Group
2025-04-01
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| Series: | Light: Advanced Manufacturing |
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| Online Access: | https://www.light-am.com/article/doi/10.37188/lam.2025.018 |
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| author | Peng Wang Taige Li Htein Lin Pengcheng Zhao Shangming Liu Hwa-Yaw Tam A. Ping Zhang |
| author_facet | Peng Wang Taige Li Htein Lin Pengcheng Zhao Shangming Liu Hwa-Yaw Tam A. Ping Zhang |
| author_sort | Peng Wang |
| collection | DOAJ |
| description | Accelerometers are crucial sensors that measure acceleration resulting from motion or vibration. Compared with their electromechanical counterparts, optical accelerometers are widely regarded as the most promising technology for high-requirement applications. However, compact integration of various optical and mechanical components to create a miniature optomechanical microsystem for acceleration sensing remains a challenge. In this study, we present a miniature optical fiber accelerometer based on a 3D microprinted ferrule-top Fabry–Pérot (FP) microinterferometer. In-situ 3D microprinting technology was developed to directly print a sub-millimeter-scale 3D proof mass/thin-film reflector-integrated FP microinterferometer on the inherently light-coupled end face of a fiber optic ferrule. Experimental results demonstrate that the optical fiber accelerometer has a flat response over a bandwidth of 2 to 3 kHz and its noise equivalent acceleration is 62.45 μg/Hz under 1-g acceleration at 2 kHz. This ultracompact optical fiber interferometric accelerometer offers several distinct advantages, including immunity to electromagnetic interference, remote-sensing capability, and high customizability, making it highly promising for a variety of stringent acceleration-monitoring applications. |
| format | Article |
| id | doaj-art-2cacbf2e433449f5a8333b5f9259703a |
| institution | DOAJ |
| issn | 2689-9620 |
| language | English |
| publishDate | 2025-04-01 |
| publisher | Light Publishing Group |
| record_format | Article |
| series | Light: Advanced Manufacturing |
| spelling | doaj-art-2cacbf2e433449f5a8333b5f9259703a2025-08-20T03:23:34ZengLight Publishing GroupLight: Advanced Manufacturing2689-96202025-04-016115216010.37188/lam.2025.018Miniature optical fiber accelerometer based on an in-situ 3D microprinted ferrule-top Fabry–Pérot microinterferometerPeng Wang0https://orcid.org/0009-0004-0725-9733Taige Li1Htein Lin2Pengcheng Zhao3https://orcid.org/0000-0002-4433-119XShangming Liu4Hwa-Yaw Tam5A. Ping Zhanghttps://orcid.org/0000-0003-2469-5225Photonics Research Institute, Department of Electrical and Electronic Engineering, The Hong Kong Polytechnic University, Kowloon, Hong Kong SAR, ChinaPhotonics Research Institute, Department of Electrical and Electronic Engineering, The Hong Kong Polytechnic University, Kowloon, Hong Kong SAR, ChinaPhotonics Research Institute, Department of Electrical and Electronic Engineering, The Hong Kong Polytechnic University, Kowloon, Hong Kong SAR, ChinaPhotonics Research Institute, Department of Electrical and Electronic Engineering, The Hong Kong Polytechnic University, Kowloon, Hong Kong SAR, ChinaPhotonics Research Institute, Department of Electrical and Electronic Engineering, The Hong Kong Polytechnic University, Kowloon, Hong Kong SAR, ChinaPhotonics Research Institute, Department of Electrical and Electronic Engineering, The Hong Kong Polytechnic University, Kowloon, Hong Kong SAR, ChinaAccelerometers are crucial sensors that measure acceleration resulting from motion or vibration. Compared with their electromechanical counterparts, optical accelerometers are widely regarded as the most promising technology for high-requirement applications. However, compact integration of various optical and mechanical components to create a miniature optomechanical microsystem for acceleration sensing remains a challenge. In this study, we present a miniature optical fiber accelerometer based on a 3D microprinted ferrule-top Fabry–Pérot (FP) microinterferometer. In-situ 3D microprinting technology was developed to directly print a sub-millimeter-scale 3D proof mass/thin-film reflector-integrated FP microinterferometer on the inherently light-coupled end face of a fiber optic ferrule. Experimental results demonstrate that the optical fiber accelerometer has a flat response over a bandwidth of 2 to 3 kHz and its noise equivalent acceleration is 62.45 μg/Hz under 1-g acceleration at 2 kHz. This ultracompact optical fiber interferometric accelerometer offers several distinct advantages, including immunity to electromagnetic interference, remote-sensing capability, and high customizability, making it highly promising for a variety of stringent acceleration-monitoring applications.https://www.light-am.com/article/doi/10.37188/lam.2025.018optical fiber accelerometeroptomechanical sensorfabry–pérot interferometer3d microprinting |
| spellingShingle | Peng Wang Taige Li Htein Lin Pengcheng Zhao Shangming Liu Hwa-Yaw Tam A. Ping Zhang Miniature optical fiber accelerometer based on an in-situ 3D microprinted ferrule-top Fabry–Pérot microinterferometer Light: Advanced Manufacturing optical fiber accelerometer optomechanical sensor fabry–pérot interferometer 3d microprinting |
| title | Miniature optical fiber accelerometer based on an in-situ 3D microprinted ferrule-top Fabry–Pérot microinterferometer |
| title_full | Miniature optical fiber accelerometer based on an in-situ 3D microprinted ferrule-top Fabry–Pérot microinterferometer |
| title_fullStr | Miniature optical fiber accelerometer based on an in-situ 3D microprinted ferrule-top Fabry–Pérot microinterferometer |
| title_full_unstemmed | Miniature optical fiber accelerometer based on an in-situ 3D microprinted ferrule-top Fabry–Pérot microinterferometer |
| title_short | Miniature optical fiber accelerometer based on an in-situ 3D microprinted ferrule-top Fabry–Pérot microinterferometer |
| title_sort | miniature optical fiber accelerometer based on an in situ 3d microprinted ferrule top fabry perot microinterferometer |
| topic | optical fiber accelerometer optomechanical sensor fabry–pérot interferometer 3d microprinting |
| url | https://www.light-am.com/article/doi/10.37188/lam.2025.018 |
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