Atomic Simulation of Wear and Slip Behavior Between Monocrystalline Silicon and 6H-SiC Friction Pair
The slip mechanism between the chunk and wafer during high-speed dynamic scanning of the extreme ultraviolet lithography (EUV) motion stage remains unclear. Considering real-machined roughness, molecular dynamics (MD) simulations were performed to investigate the nanotribological behavior of 6H-SiC...
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| Format: | Article |
| Language: | English |
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MDPI AG
2025-03-01
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| Series: | Lubricants |
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| Online Access: | https://www.mdpi.com/2075-4442/13/4/147 |
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| author | Jiansheng Pan Jianwei Wu Daiyi Lei Huan Liu Pengyue Zhao Bo Zhao Jiang Liu Qingshan Yang |
| author_facet | Jiansheng Pan Jianwei Wu Daiyi Lei Huan Liu Pengyue Zhao Bo Zhao Jiang Liu Qingshan Yang |
| author_sort | Jiansheng Pan |
| collection | DOAJ |
| description | The slip mechanism between the chunk and wafer during high-speed dynamic scanning of the extreme ultraviolet lithography (EUV) motion stage remains unclear. Considering real-machined roughness, molecular dynamics (MD) simulations were performed to investigate the nanotribological behavior of 6H-SiC sliders on single-crystal silicon substrates. The effects of sinusoidal asperity parameters and normal loads on wear and slip were systematically analyzed. Results indicate that, for friction between sinusoidal asperities and ideal flat surfaces, the amplitude of surface parameters exhibits negligible influence on friction. In contrast, reduced normal loads and lower periods significantly increase both friction force and coefficient of friction (COF). |
| format | Article |
| id | doaj-art-2a05f13e5fb14d8ba2d0c4d3bb330154 |
| institution | DOAJ |
| issn | 2075-4442 |
| language | English |
| publishDate | 2025-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Lubricants |
| spelling | doaj-art-2a05f13e5fb14d8ba2d0c4d3bb3301542025-08-20T03:13:52ZengMDPI AGLubricants2075-44422025-03-0113414710.3390/lubricants13040147Atomic Simulation of Wear and Slip Behavior Between Monocrystalline Silicon and 6H-SiC Friction PairJiansheng Pan0Jianwei Wu1Daiyi Lei2Huan Liu3Pengyue Zhao4Bo Zhao5Jiang Liu6Qingshan Yang7Center of Ultra-Precision Optoelectronic Instrumentation Engineering, Harbin Institute of Technology, Harbin 150001, ChinaCenter of Ultra-Precision Optoelectronic Instrumentation Engineering, Harbin Institute of Technology, Harbin 150001, ChinaCenter of Ultra-Precision Optoelectronic Instrumentation Engineering, Harbin Institute of Technology, Harbin 150001, ChinaCenter of Ultra-Precision Optoelectronic Instrumentation Engineering, Harbin Institute of Technology, Harbin 150001, ChinaCenter of Ultra-Precision Optoelectronic Instrumentation Engineering, Harbin Institute of Technology, Harbin 150001, ChinaCenter of Ultra-Precision Optoelectronic Instrumentation Engineering, Harbin Institute of Technology, Harbin 150001, ChinaCenter of Ultra-Precision Optoelectronic Instrumentation Engineering, Harbin Institute of Technology, Harbin 150001, ChinaCenter of Ultra-Precision Optoelectronic Instrumentation Engineering, Harbin Institute of Technology, Harbin 150001, ChinaThe slip mechanism between the chunk and wafer during high-speed dynamic scanning of the extreme ultraviolet lithography (EUV) motion stage remains unclear. Considering real-machined roughness, molecular dynamics (MD) simulations were performed to investigate the nanotribological behavior of 6H-SiC sliders on single-crystal silicon substrates. The effects of sinusoidal asperity parameters and normal loads on wear and slip were systematically analyzed. Results indicate that, for friction between sinusoidal asperities and ideal flat surfaces, the amplitude of surface parameters exhibits negligible influence on friction. In contrast, reduced normal loads and lower periods significantly increase both friction force and coefficient of friction (COF).https://www.mdpi.com/2075-4442/13/4/147microslipmolecular dynamicssinusoidal asperitynormal load |
| spellingShingle | Jiansheng Pan Jianwei Wu Daiyi Lei Huan Liu Pengyue Zhao Bo Zhao Jiang Liu Qingshan Yang Atomic Simulation of Wear and Slip Behavior Between Monocrystalline Silicon and 6H-SiC Friction Pair Lubricants microslip molecular dynamics sinusoidal asperity normal load |
| title | Atomic Simulation of Wear and Slip Behavior Between Monocrystalline Silicon and 6H-SiC Friction Pair |
| title_full | Atomic Simulation of Wear and Slip Behavior Between Monocrystalline Silicon and 6H-SiC Friction Pair |
| title_fullStr | Atomic Simulation of Wear and Slip Behavior Between Monocrystalline Silicon and 6H-SiC Friction Pair |
| title_full_unstemmed | Atomic Simulation of Wear and Slip Behavior Between Monocrystalline Silicon and 6H-SiC Friction Pair |
| title_short | Atomic Simulation of Wear and Slip Behavior Between Monocrystalline Silicon and 6H-SiC Friction Pair |
| title_sort | atomic simulation of wear and slip behavior between monocrystalline silicon and 6h sic friction pair |
| topic | microslip molecular dynamics sinusoidal asperity normal load |
| url | https://www.mdpi.com/2075-4442/13/4/147 |
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