Direct writing of graphitic carbon/polydimethylsiloxane bimorph thermal microactuator via two-photon polymerization and laser-induced graphitization
This paper presents a laser direct writing method for the fabrication of a laser-induced graphitic carbon (LIGC)/polydimethylsiloxane (PDMS) bimorph thermal microactuator via two-photon polymerization (TPP) and laser-induced graphitization (LIG). The fundamental parameters of femtosecond laser dotti...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2024-10-01
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| Series: | Mechanical Engineering Journal |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/mej/11/6/11_24-00035/_pdf/-char/en |
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