Simulation of three dimensional diffraction patterns as aid of structural analysis for complex epitaxial films
Abstract Thin film is the form of material that most closely resembles the silicon-based integrated circuits (IC) and therefore has attracted tremendous attention over the past decades due to its potential applications in integrating functional devices on IC chips. The structural characterization of...
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| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2025-05-01
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| Series: | Scientific Reports |
| Subjects: | |
| Online Access: | https://doi.org/10.1038/s41598-025-01310-w |
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