Method for Removing Impurities by Treating Silicon Tetrachloride with Hydrogen Plasma
The transformation of organochlorine and organic impurities such as CCl<sub>4</sub>, C<sub>2</sub>H<sub>2</sub>Cl<sub>2</sub>, C<sub>2</sub>HCl<sub>3</sub>, C<sub>2</sub>Cl<sub>4</sub>, C<sub>2</...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-03-01
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| Series: | Inorganics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2304-6740/13/3/80 |
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