A Microfabrication Technique for High-Performance Diffractive Optical Elements Tailored for Numerical Simulation
Diffractive optical elements (DOEs) are specialized optical components that manipulate light through diffraction for various applications, including holography, spectroscopy, augmented reality (AR) and virtual reality (VR), and light detection and ranging (LiDAR). The performance of DOEs is highly d...
Saved in:
| Main Authors: | , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-01-01
|
| Series: | Nanomaterials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-4991/15/2/138 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1832587788841648128 |
|---|---|
| author | Xingang Dai Yanjun Hu Bowen Niu Qun Dai Yu Ao Hongru Zhang Gaoshan Jing Yuan Li Guofang Fan |
| author_facet | Xingang Dai Yanjun Hu Bowen Niu Qun Dai Yu Ao Hongru Zhang Gaoshan Jing Yuan Li Guofang Fan |
| author_sort | Xingang Dai |
| collection | DOAJ |
| description | Diffractive optical elements (DOEs) are specialized optical components that manipulate light through diffraction for various applications, including holography, spectroscopy, augmented reality (AR) and virtual reality (VR), and light detection and ranging (LiDAR). The performance of DOEs is highly determined by fabricated materials and fabrication methods, in addition to the numerical simulation design. This paper presents a microfabrication technique optimized for DOEs, enabling precise control of critical parameters, such as refractive index (RI) and thickness. Using photolithography, we fabricated high-precision photoresist patterns on silicon and sapphire substrates, with 3 × 3 and 3 × 5 DOE beam splitter as examples. The results show a strong match between simulation and experimental data, with discrepancies of just 0.53% and 0.57% for DOE on silicon and sapphire substrates, respectively. This approach offers potential for advancing high-performance DOE devices in semiconductor manufacturing, supporting next-generation optical systems. |
| format | Article |
| id | doaj-art-2795d6629c504424bc37d8443d1a923e |
| institution | Kabale University |
| issn | 2079-4991 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Nanomaterials |
| spelling | doaj-art-2795d6629c504424bc37d8443d1a923e2025-01-24T13:44:16ZengMDPI AGNanomaterials2079-49912025-01-0115213810.3390/nano15020138A Microfabrication Technique for High-Performance Diffractive Optical Elements Tailored for Numerical SimulationXingang Dai0Yanjun Hu1Bowen Niu2Qun Dai3Yu Ao4Hongru Zhang5Gaoshan Jing6Yuan Li7Guofang Fan8Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing 100044, ChinaKey Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing 100044, ChinaKey Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing 100044, ChinaKey Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing 100044, ChinaKey Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing 100044, ChinaInstitute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, ChinaInstitute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, ChinaShanghai Institute of Measurement and Testing Technology, National Center of Measurement and Testing for East China, National Center of Testing Technology, Shanghai 201203, ChinaKey Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing 100044, ChinaDiffractive optical elements (DOEs) are specialized optical components that manipulate light through diffraction for various applications, including holography, spectroscopy, augmented reality (AR) and virtual reality (VR), and light detection and ranging (LiDAR). The performance of DOEs is highly determined by fabricated materials and fabrication methods, in addition to the numerical simulation design. This paper presents a microfabrication technique optimized for DOEs, enabling precise control of critical parameters, such as refractive index (RI) and thickness. Using photolithography, we fabricated high-precision photoresist patterns on silicon and sapphire substrates, with 3 × 3 and 3 × 5 DOE beam splitter as examples. The results show a strong match between simulation and experimental data, with discrepancies of just 0.53% and 0.57% for DOE on silicon and sapphire substrates, respectively. This approach offers potential for advancing high-performance DOE devices in semiconductor manufacturing, supporting next-generation optical systems.https://www.mdpi.com/2079-4991/15/2/138diffractive optical elementmicrofabricationuniformityphotolithography |
| spellingShingle | Xingang Dai Yanjun Hu Bowen Niu Qun Dai Yu Ao Hongru Zhang Gaoshan Jing Yuan Li Guofang Fan A Microfabrication Technique for High-Performance Diffractive Optical Elements Tailored for Numerical Simulation Nanomaterials diffractive optical element microfabrication uniformity photolithography |
| title | A Microfabrication Technique for High-Performance Diffractive Optical Elements Tailored for Numerical Simulation |
| title_full | A Microfabrication Technique for High-Performance Diffractive Optical Elements Tailored for Numerical Simulation |
| title_fullStr | A Microfabrication Technique for High-Performance Diffractive Optical Elements Tailored for Numerical Simulation |
| title_full_unstemmed | A Microfabrication Technique for High-Performance Diffractive Optical Elements Tailored for Numerical Simulation |
| title_short | A Microfabrication Technique for High-Performance Diffractive Optical Elements Tailored for Numerical Simulation |
| title_sort | microfabrication technique for high performance diffractive optical elements tailored for numerical simulation |
| topic | diffractive optical element microfabrication uniformity photolithography |
| url | https://www.mdpi.com/2079-4991/15/2/138 |
| work_keys_str_mv | AT xingangdai amicrofabricationtechniqueforhighperformancediffractiveopticalelementstailoredfornumericalsimulation AT yanjunhu amicrofabricationtechniqueforhighperformancediffractiveopticalelementstailoredfornumericalsimulation AT bowenniu amicrofabricationtechniqueforhighperformancediffractiveopticalelementstailoredfornumericalsimulation AT qundai amicrofabricationtechniqueforhighperformancediffractiveopticalelementstailoredfornumericalsimulation AT yuao amicrofabricationtechniqueforhighperformancediffractiveopticalelementstailoredfornumericalsimulation AT hongruzhang amicrofabricationtechniqueforhighperformancediffractiveopticalelementstailoredfornumericalsimulation AT gaoshanjing amicrofabricationtechniqueforhighperformancediffractiveopticalelementstailoredfornumericalsimulation AT yuanli amicrofabricationtechniqueforhighperformancediffractiveopticalelementstailoredfornumericalsimulation AT guofangfan amicrofabricationtechniqueforhighperformancediffractiveopticalelementstailoredfornumericalsimulation AT xingangdai microfabricationtechniqueforhighperformancediffractiveopticalelementstailoredfornumericalsimulation AT yanjunhu microfabricationtechniqueforhighperformancediffractiveopticalelementstailoredfornumericalsimulation AT bowenniu microfabricationtechniqueforhighperformancediffractiveopticalelementstailoredfornumericalsimulation AT qundai microfabricationtechniqueforhighperformancediffractiveopticalelementstailoredfornumericalsimulation AT yuao microfabricationtechniqueforhighperformancediffractiveopticalelementstailoredfornumericalsimulation AT hongruzhang microfabricationtechniqueforhighperformancediffractiveopticalelementstailoredfornumericalsimulation AT gaoshanjing microfabricationtechniqueforhighperformancediffractiveopticalelementstailoredfornumericalsimulation AT yuanli microfabricationtechniqueforhighperformancediffractiveopticalelementstailoredfornumericalsimulation AT guofangfan microfabricationtechniqueforhighperformancediffractiveopticalelementstailoredfornumericalsimulation |